Static Contact Micro Four-Point Probes with <11 nm positioning repeatability

Research output: Contribution to journalJournal article – Annual report year: 2008Researchpeer-review

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Original languageEnglish
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Pages (from-to)1092-1095
ISSN0167-9317
DOIs
Publication statusPublished - 2008
CitationsWeb of Science® Times Cited: No match on DOI

ID: 3229181