Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium

S. Massahi; S. Svendsen; D. Paredes-Sanz; D. D. M. Ferreira; F. E. Christensen; N. Gellert; A. 'S Jegers; M. Collon; D. Girou; B. Landgraf; A. Thete; I. Ferreira; M. Bavdaz; L. Cibik; D. Skroblin; C. Gollwitzer; M. Krumrey

doi:10.1117/12.3020396

Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium

S. Massahi, S. Svendsen, D. Paredes-Sanz, D. D. M. Ferreira, F. E. Christensen, N. Gellert, A. 'S Jegers, M. Collon, D. Girou, B. Landgraf, A. Thete, I. Ferreira, M. Bavdaz, L. Cibik, D. Skroblin, C. Gollwitzer, M. Krumrey

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Abstract

NewAthena (New Advanced Telescope for High–Energy Astrophysics) has been endorsed by the European Space Agency in November 2023 and the mission is entering a pre–industrialization phase prior to the foreseen adoption early 2027.

A key aspect of the thin film coating development for the NewATHENA X–ray optics, is to determine the adhesion efficiency and the residual stress limitation of the coatings on silicon substrates. To do so, we magnetron sputtered different layer thicknesses of chromium layers underneath iridium/carbon bilayer and linear graded multilayer coatings. The samples were characterized using X–ray Reflectometry (XRR) to derive the thickness and micro–roughness. The residual stress was assessed by profilometry using a Dektak 150 stylus profilometer. The curvature of the samples before and after coating, along with the total film thickness derived from XRR, was used to evaluate the residual stress.

Original language	English
Title of host publication	Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray
Editors	Jan-Willem A. den Herder , Shouleh Nikzad, Kazuhiro Nakazawa
Number of pages	11
Volume	13093
Publisher	SPIE - The International Society for Optical Engineering
Publication date	2024
Article number	1309356
DOIs	https://doi.org/10.1117/12.3020396
Publication status	Published - 2024
Event	SPIE Astronomical Telescopes + Instrumentation 2024 - Yokohama, Japan Duration: 16 Jun 2024 → 21 Jun 2024

Conference

Conference	SPIE Astronomical Telescopes + Instrumentation 2024
Country/Territory	Japan
City	Yokohama
Period	16/06/2024 → 21/06/2024

Series	Proceedings of SPIE - The International Society for Optical Engineering
ISSN	0277-786X

Keywords

X–ray optics
DC magnetron sputtering
Residual stress
Thin films
X–ray reflectometry
Stylus profilometry
NewAthena mission
Silicon Pore Optics

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Massahi, S., Svendsen, S., Paredes-Sanz, D., Ferreira, D. D. M., Christensen, F. E., Gellert, N., 'S Jegers, A., Collon, M., Girou, D., Landgraf, B., Thete, A., Ferreira, I., Bavdaz, M., Cibik, L., Skroblin, D., Gollwitzer, C., & Krumrey, M. (2024). Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium. In J.-W. A. den Herder , S. Nikzad, & K. Nakazawa (Eds.), Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray (Vol. 13093). Article 1309356 SPIE - The International Society for Optical Engineering. https://doi.org/10.1117/12.3020396

Massahi, S. ; Svendsen, S. ; Paredes-Sanz, D. et al. / Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium. Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray. editor / Jan-Willem A. den Herder ; Shouleh Nikzad ; Kazuhiro Nakazawa. Vol. 13093 SPIE - The International Society for Optical Engineering, 2024. (Proceedings of SPIE - The International Society for Optical Engineering).

@inproceedings{3457d56253bb41b2b63fde98a782ecbc,

title = "Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium",

abstract = "NewAthena (New Advanced Telescope for High–Energy Astrophysics) has been endorsed by the European Space Agency in November 2023 and the mission is entering a pre–industrialization phase prior to the foreseen adoption early 2027.A key aspect of the thin film coating development for the NewATHENA X–ray optics, is to determine the adhesion efficiency and the residual stress limitation of the coatings on silicon substrates. To do so, we magnetron sputtered different layer thicknesses of chromium layers underneath iridium/carbon bilayer and linear graded multilayer coatings. The samples were characterized using X–ray Reflectometry (XRR) to derive the thickness and micro–roughness. The residual stress was assessed by profilometry using a Dektak 150 stylus profilometer. The curvature of the samples before and after coating, along with the total film thickness derived from XRR, was used to evaluate the residual stress.",

keywords = "X–ray optics, DC magnetron sputtering, Residual stress, Thin films, X–ray reflectometry, Stylus profilometry, NewAthena mission, Silicon Pore Optics",

author = "S. Massahi and S. Svendsen and D. Paredes-Sanz and Ferreira, {D. D. M.} and Christensen, {F. E.} and N. Gellert and {'S Jegers}, A. and M. Collon and D. Girou and B. Landgraf and A. Thete and I. Ferreira and M. Bavdaz and L. Cibik and D. Skroblin and C. Gollwitzer and M. Krumrey",

year = "2024",

doi = "10.1117/12.3020396",

language = "English",

volume = "13093",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE - The International Society for Optical Engineering",

editor = "{A. den Herder }, Jan-Willem and Nikzad, {Shouleh } and Nakazawa, {Kazuhiro }",

booktitle = "Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray",

note = "SPIE Astronomical Telescopes + Instrumentation 2024 ; Conference date: 16-06-2024 Through 21-06-2024",

}

Massahi, S , Svendsen, S , Paredes-Sanz, D , Ferreira, DDM , Christensen, FE , Gellert, N , 'S Jegers, A, Collon, M, Girou, D, Landgraf, B, Thete, A, Ferreira, I, Bavdaz, M, Cibik, L, Skroblin, D, Gollwitzer, C & Krumrey, M 2024, Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium. in J-W A. den Herder , S Nikzad & K Nakazawa (eds), Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray. vol. 13093, 1309356, SPIE - The International Society for Optical Engineering, Proceedings of SPIE - The International Society for Optical Engineering, SPIE Astronomical Telescopes + Instrumentation 2024, Yokohama, Japan, 16/06/2024. https://doi.org/10.1117/12.3020396

Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium. / Massahi, S.; Svendsen, S.; Paredes-Sanz, D. et al.
Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray. ed. / Jan-Willem A. den Herder ; Shouleh Nikzad; Kazuhiro Nakazawa. Vol. 13093 SPIE - The International Society for Optical Engineering, 2024. 1309356 (Proceedings of SPIE - The International Society for Optical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium

AU - Massahi, S.

AU - Svendsen, S.

AU - Paredes-Sanz, D.

AU - Ferreira, D. D. M.

AU - Christensen, F. E.

AU - Gellert, N.

AU - 'S Jegers, A.

AU - Collon, M.

AU - Girou, D.

AU - Landgraf, B.

AU - Thete, A.

AU - Ferreira, I.

AU - Bavdaz, M.

AU - Cibik, L.

AU - Skroblin, D.

AU - Gollwitzer, C.

AU - Krumrey, M.

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N2 - NewAthena (New Advanced Telescope for High–Energy Astrophysics) has been endorsed by the European Space Agency in November 2023 and the mission is entering a pre–industrialization phase prior to the foreseen adoption early 2027.A key aspect of the thin film coating development for the NewATHENA X–ray optics, is to determine the adhesion efficiency and the residual stress limitation of the coatings on silicon substrates. To do so, we magnetron sputtered different layer thicknesses of chromium layers underneath iridium/carbon bilayer and linear graded multilayer coatings. The samples were characterized using X–ray Reflectometry (XRR) to derive the thickness and micro–roughness. The residual stress was assessed by profilometry using a Dektak 150 stylus profilometer. The curvature of the samples before and after coating, along with the total film thickness derived from XRR, was used to evaluate the residual stress.

AB - NewAthena (New Advanced Telescope for High–Energy Astrophysics) has been endorsed by the European Space Agency in November 2023 and the mission is entering a pre–industrialization phase prior to the foreseen adoption early 2027.A key aspect of the thin film coating development for the NewATHENA X–ray optics, is to determine the adhesion efficiency and the residual stress limitation of the coatings on silicon substrates. To do so, we magnetron sputtered different layer thicknesses of chromium layers underneath iridium/carbon bilayer and linear graded multilayer coatings. The samples were characterized using X–ray Reflectometry (XRR) to derive the thickness and micro–roughness. The residual stress was assessed by profilometry using a Dektak 150 stylus profilometer. The curvature of the samples before and after coating, along with the total film thickness derived from XRR, was used to evaluate the residual stress.

KW - X–ray optics

KW - DC magnetron sputtering

KW - Residual stress

KW - Thin films

KW - X–ray reflectometry

KW - Stylus profilometry

KW - NewAthena mission

KW - Silicon Pore Optics

U2 - 10.1117/12.3020396

DO - 10.1117/12.3020396

M3 - Article in proceedings

VL - 13093

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray

A2 - A. den Herder , Jan-Willem

A2 - Nikzad, Shouleh

A2 - Nakazawa, Kazuhiro

PB - SPIE - The International Society for Optical Engineering

T2 - SPIE Astronomical Telescopes + Instrumentation 2024

Y2 - 16 June 2024 through 21 June 2024

ER -

Massahi S , Svendsen S , Paredes-Sanz D , Ferreira DDM , Christensen FE , Gellert N et al. Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium. In A. den Herder JW, Nikzad S, Nakazawa K, editors, Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray. Vol. 13093. SPIE - The International Society for Optical Engineering. 2024. 1309356. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.3020396

Zero residual stress determination of iridium/carbon bilayer and multilayers coatings by utilizing chromium

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