Zero- and one-dimensional nanostructures on an Si1-xGex/Si(100) surface

Flemming Jensen, Jon Wulff Petersen, S.Y. Shiryaev, A.N. Larsen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Zero- and one-dimensional nanostructures on the surface of Si1-xGex compositionally graded, epitaxial layers on Si(100) single crystals produced by a self-organized relaxation process are reported. Post-growth atomically flat surfaces can be converted into ordered, long-range coherent networks of nanostructures by a simple heat treatment procedure. The choice of heat treatment leads to a range of structures from millimeter long, single plateaus to complex patterns with nanometer structures and spacings. The vertical dimensions can be controlled in the nanometer range by varying the thickness of the Si1-xGex layer.
    Original languageEnglish
    JournalNanotechnology
    Volume7
    Issue number2
    Pages (from-to)117-121
    ISSN0957-4484
    DOIs
    Publication statusPublished - 1996

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