z calibration of the atomic force microscope by means of a pyramidal tip

Flemming Jensen

doi:10.1063/1.1143873

z calibration of the atomic force microscope by means of a pyramidal tip

Flemming Jensen

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Abstract

A new method for imaging the probe tip of an atomic force microscope cantilever by the atomic force microscope itself (self-imaging) is presented. The self-imaging is accomplished by scanning the probe tip across a sharper tip on the surface. By using a pyramidal probe tip with a very well-defined aspect ratio, this technique provides an excellent z-calibration standard for the atomic force microscope.

Original language	English
Journal	Review of Scientific Instruments
Volume	64
Issue number	9
Pages (from-to)	2595-2597
ISSN	0034-6748
DOIs	https://doi.org/10.1063/1.1143873
Publication status	Published - 1993

Bibliographical note

Copyright (1993) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics

Keywords

RESOLUTION
FILMS

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z calibration of the atomic force microscope by means of a pyramidal tip

Abstract

Bibliographical note

Keywords

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