Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping

Minh Ngoc Nguyen, Nhat Sinh Ha, Long Quang Nguyen, Hoang Manh Chu, Hoang Manh Vu

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, the driving and sensing parts of the gyroscope were designed to oscillate in-plane. Furthermore, by removing the substrate underneath the device, the slide-film air damping in the gap between the proof masses and the substrate was eliminated. The proposed architecture was analyzed by the finite element method using ANSYS software. The simulated frequencies of the driving and sensing modes were 9.788 and 9.761 kHz, respectively. The gyroscope was fabricated using bulk micromachining technology. The quality factor and sensitivity of the gyroscope operating in atmospheric conditions were measured to be 111.2 and 11.56 mV/degrees/s, respectively.
Original languageEnglish
JournalMicromachines
Volume8
Issue number2
Pages (from-to)42
Number of pages10
ISSN2072-666X
DOIs
Publication statusPublished - 2017
Externally publishedYes

Keywords

  • Bulk micromachining
  • Tuning fork gyroscope
  • Finite element analysis

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