Abstract
The present article describes several aspects of lattice strain determination in surface layers by means of X-ray diffraction analysis. Several possibilities and the origins of stress in surface layers are illustrated by the following three cases: 200 nm thick Mo layers on glass substrates; 5.5 microns thick TiN layers on heat treatable steel and 21 microns thick gamma prime-Fe4N1-x layers on iron.
Original language | English |
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Title of host publication | Dansk Metallurgisk Selskabs vintermøde 2002 |
Publication date | 2002 |
Publication status | Published - 2002 |
Event | Dansk Metallurgisk Selskabs vintermøde 2002 - Kolding, Denmark Duration: 2 Jan 2002 → 4 Jan 2002 |
Conference
Conference | Dansk Metallurgisk Selskabs vintermøde 2002 |
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Country | Denmark |
City | Kolding |
Period | 02/01/2002 → 04/01/2002 |