X-ray lattice strain determination in surface layers

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    Abstract

    The present article describes several aspects of lattice strain determination in surface layers by means of X-ray diffraction analysis. Several possibilities and the origins of stress in surface layers are illustrated by the following three cases: 200 nm thick Mo layers on glass substrates; 5.5 microns thick TiN layers on heat treatable steel and 21 microns thick gamma prime-Fe4N1-x layers on iron.
    Original languageEnglish
    Title of host publicationDansk Metallurgisk Selskabs vintermøde 2002
    Publication date2002
    Publication statusPublished - 2002
    EventDansk Metallurgisk Selskabs vintermøde 2002 - Kolding, Denmark
    Duration: 2 Jan 20024 Jan 2002

    Conference

    ConferenceDansk Metallurgisk Selskabs vintermøde 2002
    CountryDenmark
    CityKolding
    Period02/01/200204/01/2002

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