X-ray lattice strain determination in surface layers

Marcel A.J. Somers; Karen Pantleon

X-ray lattice strain determination in surface layers

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

The present article describes several aspects of lattice strain determination in surface layers by means of X-ray diffraction analysis. Several possibilities and the origins of stress in surface layers are illustrated by the following three cases: 200 nm thick Mo layers on glass substrates; 5.5 microns thick TiN layers on heat treatable steel and 21 microns thick gamma prime-Fe4N1-x layers on iron.

Original language	English
Title of host publication	Dansk Metallurgisk Selskabs vintermøde 2002
Publication date	2002
Publication status	Published - 2002
Event	Dansk Metallurgisk Selskabs vintermøde 2002 - Kolding, Denmark Duration: 2 Jan 2002 → 4 Jan 2002

Conference

Conference	Dansk Metallurgisk Selskabs vintermøde 2002
Country/Territory	Denmark
City	Kolding
Period	02/01/2002 → 04/01/2002

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@inproceedings{21021c58cfa3461ca0a30de189f14a19,

title = "X-ray lattice strain determination in surface layers",

abstract = "The present article describes several aspects of lattice strain determination in surface layers by means of X-ray diffraction analysis. Several possibilities and the origins of stress in surface layers are illustrated by the following three cases: 200 nm thick Mo layers on glass substrates; 5.5 microns thick TiN layers on heat treatable steel and 21 microns thick gamma prime-Fe4N1-x layers on iron.",

keywords = "Materials technology",

author = "Somers, \{Marcel A.J.\} and Karen Pantleon",

year = "2002",

language = "English",

booktitle = "Dansk Metallurgisk Selskabs vinterm{\o}de 2002",

note = "Dansk Metallurgisk Selskabs vinterm{\o}de 2002 ; Conference date: 02-01-2002 Through 04-01-2002",

}

TY - GEN

T1 - X-ray lattice strain determination in surface layers

AU - Somers, Marcel A.J.

AU - Pantleon, Karen

PY - 2002

Y1 - 2002

N2 - The present article describes several aspects of lattice strain determination in surface layers by means of X-ray diffraction analysis. Several possibilities and the origins of stress in surface layers are illustrated by the following three cases: 200 nm thick Mo layers on glass substrates; 5.5 microns thick TiN layers on heat treatable steel and 21 microns thick gamma prime-Fe4N1-x layers on iron.

AB - The present article describes several aspects of lattice strain determination in surface layers by means of X-ray diffraction analysis. Several possibilities and the origins of stress in surface layers are illustrated by the following three cases: 200 nm thick Mo layers on glass substrates; 5.5 microns thick TiN layers on heat treatable steel and 21 microns thick gamma prime-Fe4N1-x layers on iron.

KW - Materials technology

M3 - Article in proceedings

BT - Dansk Metallurgisk Selskabs vintermøde 2002

T2 - Dansk Metallurgisk Selskabs vintermøde 2002

Y2 - 2 January 2002 through 4 January 2002

ER -

X-ray lattice strain determination in surface layers

Abstract

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