Wettability and Thermal Stability of Fluorocarbon Films Deposited by Deep Reactive Ion Etching

Yanxin Zhuang, Aric Kumaran Menon

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	23
Issue number	3
Pages (from-to)	434-439
ISSN	1553-1813
Publication status	Published - 2005

OpenUrl availability

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title = "Wettability and Thermal Stability of Fluorocarbon Films Deposited by Deep Reactive Ion Etching",

author = "Yanxin Zhuang and Menon, {Aric Kumaran}",

year = "2005",

language = "English",

volume = "23",

pages = "434--439",

journal = "Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "1553-1813",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Wettability and Thermal Stability of Fluorocarbon Films Deposited by Deep Reactive Ion Etching

AU - Zhuang, Yanxin

AU - Menon, Aric Kumaran

PY - 2005

Y1 - 2005

M3 - Journal article

SN - 1553-1813

VL - 23

SP - 434

EP - 439

JO - Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 3

ER -