Wettability and Thermal Stability of Fluorocarbon Films Deposited by Deep Reactive Ion Etching

Yanxin Zhuang, Aric Kumaran Menon

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
    Issue number3
    Pages (from-to)434-439
    Publication statusPublished - 2005

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