Wear of silicon AFM tips during the approach process

Lorenzo Carli, Francesco Marinello, Enrico Savio, Leonardo De Chiffre

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the Euspen International Conference
Volume2
PublisherThe European Society for Precision Engineering and Nanotechnology
Publication date2008
Pages329-333
ISBN (Print)978-0-9553082-5-3
Publication statusPublished - 2008
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland
Duration: 18 May 200822 May 2008
Conference number: 10

Conference

Conference10th International Conference of the European Society for Precision Engineering and Nanotechnology
Number10
CountrySwitzerland
CityZürich
Period18/05/200822/05/2008

Keywords

  • metrology
  • Atomic Force Microscope
  • wear
  • nanotechnology

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