Wear of silicon AFM tips during the approach process

Lorenzo Carli; Francesco Marinello; Enrico Savio; Leonardo De Chiffre

Wear of silicon AFM tips during the approach process

Lorenzo Carli, Francesco Marinello, Enrico Savio, Leonardo De Chiffre

Universita di Padova

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Euspen International Conference
Volume	2
Publisher	The European Society for Precision Engineering and Nanotechnology
Publication date	2008
Pages	329-333
ISBN (Print)	978-0-9553082-5-3
Publication status	Published - 2008
Event	10th International Conference of the European Society for Precision Engineering and Nanotechnology - Zürich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10

Conference

Conference	10th International Conference of the European Society for Precision Engineering and Nanotechnology
Number	10
Country/Territory	Switzerland
City	Zürich
Period	18/05/2008 → 22/05/2008

Keywords

metrology
Atomic Force Microscope
wear
nanotechnology

OpenUrl availability

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Cite this

@inproceedings{d3375f2577e24a1b98106fa78859ee4d,

title = "Wear of silicon AFM tips during the approach process",

keywords = "metrology, Atomic Force Microscope, wear, nanotechnology",

author = "Lorenzo Carli and Francesco Marinello and Enrico Savio and {De Chiffre}, Leonardo",

year = "2008",

language = "English",

isbn = "978-0-9553082-5-3",

volume = "2",

pages = "329--333",

booktitle = "Proceedings of the Euspen International Conference",

publisher = "The European Society for Precision Engineering and Nanotechnology",

note = "10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 ; Conference date: 18-05-2008 Through 22-05-2008",

}

Carli, L, Marinello, F, Savio, E & De Chiffre, L 2008, Wear of silicon AFM tips during the approach process. in Proceedings of the Euspen International Conference. vol. 2, The European Society for Precision Engineering and Nanotechnology, pp. 329-333, 10th International Conference of the European Society for Precision Engineering and Nanotechnology, Zürich, Switzerland, 18/05/2008.

Wear of silicon AFM tips during the approach process. / Carli, Lorenzo; Marinello, Francesco; Savio, Enrico et al.
Proceedings of the Euspen International Conference. Vol. 2 The European Society for Precision Engineering and Nanotechnology, 2008. p. 329-333.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Wear of silicon AFM tips during the approach process

AU - Carli, Lorenzo

AU - Marinello, Francesco

AU - Savio, Enrico

AU - De Chiffre, Leonardo

N1 - Conference code: 10

PY - 2008

Y1 - 2008

KW - metrology

KW - Atomic Force Microscope

KW - wear

KW - nanotechnology

M3 - Article in proceedings

SN - 978-0-9553082-5-3

VL - 2

SP - 329

EP - 333

BT - Proceedings of the Euspen International Conference

PB - The European Society for Precision Engineering and Nanotechnology

T2 - 10th International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 18 May 2008 through 22 May 2008

ER -