Water Uptake of Polymeric MEMS Packaging Materials.

Jakob Janting, Elisabeth Kjærside Storm

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of MicroSystem Technologies.
Publication date2003
Pages520-522
ISBN (Print)3-7723-7020-9
Publication statusPublished - 2003
Externally publishedYes
EventMicro System Technologies 2003: International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components - München, Germany
Duration: 7 Oct 20038 Oct 2003

Conference

ConferenceMicro System Technologies 2003
CountryGermany
CityMünchen
Period07/10/200308/10/2003

Cite this

Janting, J., & Storm, E. K. (2003). Water Uptake of Polymeric MEMS Packaging Materials. In Proceedings of MicroSystem Technologies. (pp. 520-522)
Janting, Jakob ; Storm, Elisabeth Kjærside. / Water Uptake of Polymeric MEMS Packaging Materials. Proceedings of MicroSystem Technologies.. 2003. pp. 520-522
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title = "Water Uptake of Polymeric MEMS Packaging Materials.",
author = "Jakob Janting and Storm, {Elisabeth Kj{\ae}rside}",
year = "2003",
language = "English",
isbn = "3-7723-7020-9",
pages = "520--522",
booktitle = "Proceedings of MicroSystem Technologies.",

}

Janting, J & Storm, EK 2003, Water Uptake of Polymeric MEMS Packaging Materials. in Proceedings of MicroSystem Technologies.. pp. 520-522, Micro System Technologies 2003, München, Germany, 07/10/2003.

Water Uptake of Polymeric MEMS Packaging Materials. / Janting, Jakob; Storm, Elisabeth Kjærside.

Proceedings of MicroSystem Technologies.. 2003. p. 520-522.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

TY - GEN

T1 - Water Uptake of Polymeric MEMS Packaging Materials.

AU - Janting, Jakob

AU - Storm, Elisabeth Kjærside

PY - 2003

Y1 - 2003

M3 - Article in proceedings

SN - 3-7723-7020-9

SP - 520

EP - 522

BT - Proceedings of MicroSystem Technologies.

ER -

Janting J, Storm EK. Water Uptake of Polymeric MEMS Packaging Materials. In Proceedings of MicroSystem Technologies.. 2003. p. 520-522