Water Uptake of Polymeric MEMS Packaging Materials.

Jakob Janting, Elisabeth Kjærside Storm

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of MicroSystem Technologies.
Publication date2003
Pages520-522
ISBN (Print)3-7723-7020-9
Publication statusPublished - 2003
Externally publishedYes
EventMicro System Technologies 2003: International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components - München, Germany
Duration: 7 Oct 20038 Oct 2003

Conference

ConferenceMicro System Technologies 2003
CountryGermany
CityMünchen
Period07/10/200308/10/2003

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