@inproceedings{7c7771310a6a4a49b91ee72c677d75ec,
title = "Water Uptake of Polymeric MEMS Packaging Materials.",
author = "Jakob Janting and Storm, {Elisabeth Kj{\ae}rside}",
year = "2003",
language = "English",
isbn = "3-7723-7020-9",
pages = "520--522",
booktitle = "Proceedings of MicroSystem Technologies.",
note = "Micro System Technologies 2003 : International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components ; Conference date: 07-10-2003 Through 08-10-2003",
}