Water Uptake of Polymeric MEMS Packaging Materials.

Jakob Janting; Elisabeth Kjærside Storm

Water Uptake of Polymeric MEMS Packaging Materials.

Jakob Janting, Elisabeth Kjærside Storm

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of MicroSystem Technologies.
Publication date	2003
Pages	520-522
ISBN (Print)	3-7723-7020-9
Publication status	Published - 2003
Externally published	Yes
Event	Micro System Technologies 2003: International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components - München, Germany Duration: 7 Oct 2003 → 8 Oct 2003

Conference

Conference	Micro System Technologies 2003
Country/Territory	Germany
City	München
Period	07/10/2003 → 08/10/2003

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Cite this

@inproceedings{7c7771310a6a4a49b91ee72c677d75ec,

title = "Water Uptake of Polymeric MEMS Packaging Materials.",

author = "Jakob Janting and Storm, {Elisabeth Kj{\ae}rside}",

year = "2003",

language = "English",

isbn = "3-7723-7020-9",

pages = "520--522",

booktitle = "Proceedings of MicroSystem Technologies.",

note = "Micro System Technologies 2003 : International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components ; Conference date: 07-10-2003 Through 08-10-2003",

}