| Original language | English |
|---|---|
| Title of host publication | Proceedings of MicroSystem Technologies. |
| Publication date | 2003 |
| Pages | 520-522 |
| ISBN (Print) | 3-7723-7020-9 |
| Publication status | Published - 2003 |
| Externally published | Yes |
| Event | Micro System Technologies 2003: International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components - München, Germany Duration: 7 Oct 2003 → 8 Oct 2003 |
Conference
| Conference | Micro System Technologies 2003 |
|---|---|
| Country | Germany |
| City | München |
| Period | 07/10/2003 → 08/10/2003 |
Cite this
Janting, J., & Storm, E. K. (2003). Water Uptake of Polymeric MEMS Packaging Materials. In Proceedings of MicroSystem Technologies. (pp. 520-522)
@inproceedings{7c7771310a6a4a49b91ee72c677d75ec,
title = "Water Uptake of Polymeric MEMS Packaging Materials.",
author = "Jakob Janting and Storm, {Elisabeth Kj{\ae}rside}",
year = "2003",
language = "English",
isbn = "3-7723-7020-9",
pages = "520--522",
booktitle = "Proceedings of MicroSystem Technologies.",
}
Janting, J & Storm, EK 2003, Water Uptake of Polymeric MEMS Packaging Materials. in Proceedings of MicroSystem Technologies.. pp. 520-522, Micro System Technologies 2003, München, Germany, 07/10/2003.
Water Uptake of Polymeric MEMS Packaging Materials. / Janting, Jakob; Storm, Elisabeth Kjærside.
Proceedings of MicroSystem Technologies.. 2003. p. 520-522.Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review
TY - GEN
T1 - Water Uptake of Polymeric MEMS Packaging Materials.
AU - Janting, Jakob
AU - Storm, Elisabeth Kjærside
PY - 2003
Y1 - 2003
M3 - Article in proceedings
SN - 3-7723-7020-9
SP - 520
EP - 522
BT - Proceedings of MicroSystem Technologies.
ER -
Janting J, Storm EK. Water Uptake of Polymeric MEMS Packaging Materials. In Proceedings of MicroSystem Technologies.. 2003. p. 520-522