Wafer-scale fabrication of suspended TiW Nanowires

Lauge Gammelgaard, Søren Dohn, R.J. Wojtecki, Anja Boisen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Micro and Nano Engineering 2006 International Conference
Publication date	2006
Pages	81-82
Publication status	Published - 2006
Event	32nd International Conference on Micro- and Nano- Engineering 2006 - La Caixa, Barcelona, Spain Duration: 17 Sept 2006 → 20 Sept 2006 Conference number: 32 http://www.mne-conf.org/2006/exhibition.php

Conference	32nd International Conference on Micro- and Nano- Engineering 2006
Number	32
Location	La Caixa
Country/Territory	Spain
City	Barcelona
Period	17/09/2006 → 20/09/2006
Sponsor	La Caixa
Internet address	http://www.mne-conf.org/2006/exhibition.php

OpenUrl availability

@inproceedings{52b2fd6c3d6d48a6bf622bb0726b1e57,

title = "Wafer-scale fabrication of suspended TiW Nanowires",

author = "Lauge Gammelgaard and S{\o}ren Dohn and R.J. Wojtecki and Anja Boisen",

year = "2006",

language = "English",

pages = "81--82",

booktitle = "Proceedings of the Micro and Nano Engineering 2006 International Conference",

note = "32nd International Conference on Micro- and Nano- Engineering 2006 , MNE 2006 ; Conference date: 17-09-2006 Through 20-09-2006",

url = "http://www.mne-conf.org/2006/exhibition.php",

}

TY - GEN

T1 - Wafer-scale fabrication of suspended TiW Nanowires

AU - Gammelgaard, Lauge

AU - Dohn, Søren

AU - Wojtecki, R.J.

AU - Boisen, Anja

N1 - Conference code: 32

PY - 2006

Y1 - 2006

M3 - Article in proceedings

SP - 81

EP - 82

BT - Proceedings of the Micro and Nano Engineering 2006 International Conference

T2 - 32nd International Conference on Micro- and Nano- Engineering 2006

Y2 - 17 September 2006 through 20 September 2006

ER -