Wafer scale coating of polymer cantilever fabricated by nanoimprint lithography

Anders Greve, Søren Dohn, Stephan Urs Keller, Asger Laurberg Vig, Anders Kristensen, Claus Højgård Nielsen, Niels Bent Larsen, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

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    Abstract

    Microcantilevers can be fabricated in TOPAS by nanoimprint lithography, with the dimensions of 500 ¿m length 4.5 ¿m thickness and 100 ¿m width. By using a plasma polymerization technique it is possible to selectively functionalize individually cantilevers with a polymer coating, on wafer scale by using a shadow masking technique.
    Original languageEnglish
    Title of host publication2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
    PublisherIEEE
    Publication date2010
    Pages612-614
    ISBN (Print)978-1-4244-5761-8
    ISBN (Electronic)978-1-4244-5763-2
    DOIs
    Publication statusPublished - 2010
    Event2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong
    Duration: 24 Jan 201028 Jan 2010

    Conference

    Conference2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
    CountryHong Kong
    CityWanchai
    Period24/01/201028/01/2010

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