Visualization of mold filling stages in thermal nanoimprint by using pressure gradients

H. Schift, S. Bellini, Morten Bo Lindholm Mikkelsen, J. Gobrecht

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    A method for the visualization of mold filling during a thermoplastic imprint at a microscopic level was developed, which is based on superposition of images of a series of different states of imprint. The animated movie sequence gives an insight into the complex flow of polymer and shows how voids are forming and vanishing during the imprint process. It can therefore be used as a tool for optimization of processes and improvement of stamp design.
    Original languageEnglish
    JournalJournal of Vacuum Science & Technology B
    Volume25
    Issue number6
    Pages (from-to)2312-2316
    ISSN1071-1023
    DOIs
    Publication statusPublished - 2007

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