Vibration tolerance of micro-electrodes

Kristoffer Gram Kalhauge*, Henrik Hartmann Henrichsen, Fei Wang, Ole Hansen, Dirch Hjorth Petersen

*Corresponding author for this work

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    Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.
    Original languageEnglish
    Article number095010
    JournalJournal of Micromechanics and Microengineering
    Issue number9
    Number of pages6
    Publication statusPublished - 2018


    • Micro four-point probe
    • Electrical metrology
    • Mechanical vibration
    • Micro-electrodes


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