Vibration tolerance of micro-electrodes

Kristoffer Gram Kalhauge; Henrik Hartmann Henrichsen; Fei Wang; Ole Hansen; Dirch Hjorth Petersen

doi:10.1088/1361-6439/aac58e

Vibration tolerance of micro-electrodes

Kristoffer Gram Kalhauge^*, Henrik Hartmann Henrichsen, Fei Wang, Ole Hansen, Dirch Hjorth Petersen

^*Corresponding author for this work

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Abstract

Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.

Original language	English
Article number	095010
Journal	Journal of Micromechanics and Microengineering
Volume	28
Issue number	9
Number of pages	6
ISSN	0960-1317
DOIs	https://doi.org/10.1088/1361-6439/aac58e
Publication status	Published - 2018

Keywords

Micro four-point probe
Electrical metrology
Mechanical vibration
Micro-electrodes

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@article{7c5a985fe9424ceb84d7dd067fdf00e2,

title = "Vibration tolerance of micro-electrodes",

abstract = "Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.",

keywords = "Micro four-point probe, Electrical metrology, Mechanical vibration, Micro-electrodes",

author = "Kalhauge, {Kristoffer Gram} and Henrichsen, {Henrik Hartmann} and Fei Wang and Ole Hansen and Petersen, {Dirch Hjorth}",

year = "2018",

doi = "10.1088/1361-6439/aac58e",

language = "English",

volume = "28",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "9",

}

TY - JOUR

T1 - Vibration tolerance of micro-electrodes

AU - Kalhauge, Kristoffer Gram

AU - Henrichsen, Henrik Hartmann

AU - Wang, Fei

AU - Hansen, Ole

AU - Petersen, Dirch Hjorth

PY - 2018

Y1 - 2018

N2 - Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.

AB - Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.

KW - Micro four-point probe

KW - Electrical metrology

KW - Mechanical vibration

KW - Micro-electrodes

U2 - 10.1088/1361-6439/aac58e

DO - 10.1088/1361-6439/aac58e

M3 - Journal article

SN - 0960-1317

VL - 28

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 9

M1 - 095010

ER -

Vibration tolerance of micro-electrodes

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