Vibration tolerance of micro-electrodes

Kristoffer Gram Kalhauge*, Henrik Hartmann Henrichsen, Fei Wang, Ole Hansen, Dirch Hjorth Petersen

*Corresponding author for this work

    Research output: Contribution to journalJournal articleResearchpeer-review

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    Abstract

    Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.
    Original languageEnglish
    Article number095010
    JournalJournal of Micromechanics and Microengineering
    Volume28
    Issue number9
    Number of pages6
    ISSN0960-1317
    DOIs
    Publication statusPublished - 2018

    Keywords

    • Micro four-point probe
    • Electrical metrology
    • Mechanical vibration
    • Micro-electrodes

    Cite this

    @article{7c5a985fe9424ceb84d7dd067fdf00e2,
    title = "Vibration tolerance of micro-electrodes",
    abstract = "Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.",
    keywords = "Micro four-point probe, Electrical metrology, Mechanical vibration, Micro-electrodes",
    author = "Kalhauge, {Kristoffer Gram} and Henrichsen, {Henrik Hartmann} and Fei Wang and Ole Hansen and Petersen, {Dirch Hjorth}",
    year = "2018",
    doi = "10.1088/1361-6439/aac58e",
    language = "English",
    volume = "28",
    journal = "Journal of Micromechanics and Microengineering",
    issn = "0960-1317",
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    Vibration tolerance of micro-electrodes. / Kalhauge, Kristoffer Gram; Henrichsen, Henrik Hartmann; Wang, Fei; Hansen, Ole; Petersen, Dirch Hjorth.

    In: Journal of Micromechanics and Microengineering, Vol. 28, No. 9, 095010, 2018.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - Vibration tolerance of micro-electrodes

    AU - Kalhauge, Kristoffer Gram

    AU - Henrichsen, Henrik Hartmann

    AU - Wang, Fei

    AU - Hansen, Ole

    AU - Petersen, Dirch Hjorth

    PY - 2018

    Y1 - 2018

    N2 - Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.

    AB - Micro four-point probe measurements can be used for extremely accurate electrical characterization of advanced electronic materials. The measurements are, however, sensitive to environmental vibrations which may compromise measurement quality severely. We have experimentally measured the vibration tolerance of two different micro-electrode designs (straight and three-way flexible) on two different samples (indium-tin-oxide and highly doped silicon). We show that three-way flexible electrodes are significantly more vibration tolerant (at least 50 times) compared to their straight counterparts. We have theoretically analyzed the vibration tolerance of the electrode designs and show excellent agreement between theory and experiment; as a result the theoretical framework may be used to predict vibration tolerance of any micro-electrode.

    KW - Micro four-point probe

    KW - Electrical metrology

    KW - Mechanical vibration

    KW - Micro-electrodes

    U2 - 10.1088/1361-6439/aac58e

    DO - 10.1088/1361-6439/aac58e

    M3 - Journal article

    VL - 28

    JO - Journal of Micromechanics and Microengineering

    JF - Journal of Micromechanics and Microengineering

    SN - 0960-1317

    IS - 9

    M1 - 095010

    ER -