Vertical sidewall roughness measured by AFM and SEM

Jørgen Garnæs, Brian Bilenberg Olsen, Radu Malureanu, J. Markussen

Research output: Contribution to journalConference articleResearchpeer-review

Original languageEnglish
JournalMeasurement Science and Technology
ISSN0957-0233
Publication statusPublished - 2011
EventNanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods - Brno, Czech Republic
Duration: 1 Jan 2010 → …

Conference

ConferenceNanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods
CityBrno, Czech Republic
Period01/01/2010 → …

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