Vertical sidewall roughness measured by AFM and SEM

Jørgen Garnæs; Brian Bilenberg Olsen; Radu Malureanu; J. Markussen

Vertical sidewall roughness measured by AFM and SEM

Jørgen Garnæs, Brian Bilenberg Olsen, Radu Malureanu, J. Markussen

Research output: Contribution to journal › Conference article › Research › peer-review

Original language	English
Journal	Measurement Science and Technology
ISSN	0957-0233
Publication status	Published - 2011
Event	NanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods - Brno, Czech Republic Duration: 1 Jan 2010 → …

Conference

Conference	NanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods
City	Brno, Czech Republic
Period	01/01/2010 → …

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@inproceedings{891684c65c284671b5ed5781ef16c0c3,

title = "Vertical sidewall roughness measured by AFM and SEM",

author = "J{\o}rgen Garn{\ae}s and Olsen, {Brian Bilenberg} and Radu Malureanu and J. Markussen",

year = "2011",

language = "English",

journal = "Measurement Science and Technology",

issn = "0957-0233",

note = "NanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods ; Conference date: 01-01-2010",

}

TY - GEN

T1 - Vertical sidewall roughness measured by AFM and SEM

AU - Garnæs, Jørgen

AU - Olsen, Brian Bilenberg

AU - Malureanu, Radu

AU - Markussen, J.

PY - 2011

Y1 - 2011

M3 - Conference article

JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

T2 - NanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods

Y2 - 1 January 2010

ER -