Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS

Yanxin Zhuang; Ole Hansen; Thomas Knieling; Christian Wang; Pirmin Rombach; Walter Lang; Wolfgang Benecke; Markus Kehlenbeck; Jörn Koblitz

doi:10.1109/JMEMS.2007.904342

Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS

Yanxin Zhuang
, Ole Hansen
, Thomas Knieling
, Christian Wang
, Pirmin Rombach
, Walter Lang
, Wolfgang Benecke
, Markus Kehlenbeck
, Jörn Koblitz

Research output: Contribution to journal › Journal article › Research › peer-review

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Abstract

We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.

Original language	English
Journal	I E E E Journal of Microelectromechanical Systems
Volume	16
Issue number	6
Pages (from-to)	1451-1460
ISSN	1057-7157
DOIs	https://doi.org/10.1109/JMEMS.2007.904342
Publication status	Published - 2007

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Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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title = "Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS",

abstract = "We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.",

author = "Yanxin Zhuang and Ole Hansen and Thomas Knieling and Christian Wang and Pirmin Rombach and Walter Lang and Wolfgang Benecke and Markus Kehlenbeck and J{\"o}rn Koblitz",

note = "Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE",

year = "2007",

doi = "10.1109/JMEMS.2007.904342",

language = "English",

volume = "16",

pages = "1451--1460",

journal = "I E E E Journal of Microelectromechanical Systems",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "6",

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T1 - Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS

AU - Zhuang, Yanxin

AU - Hansen, Ole

AU - Knieling, Thomas

AU - Wang, Christian

AU - Rombach, Pirmin

AU - Lang, Walter

AU - Benecke, Wolfgang

AU - Kehlenbeck, Markus

AU - Koblitz, Jörn

N1 - Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

PY - 2007

Y1 - 2007

N2 - We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.

AB - We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.

U2 - 10.1109/JMEMS.2007.904342

DO - 10.1109/JMEMS.2007.904342

M3 - Journal article

SN - 1057-7157

VL - 16

SP - 1451

EP - 1460

JO - I E E E Journal of Microelectromechanical Systems

JF - I E E E Journal of Microelectromechanical Systems

IS - 6

ER -

Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS

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