TY - JOUR
T1 - Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS
AU - Zhuang, Yanxin
AU - Hansen, Ole
AU - Knieling, Thomas
AU - Wang, Christian
AU - Rombach, Pirmin
AU - Lang, Walter
AU - Benecke, Wolfgang
AU - Kehlenbeck, Markus
AU - Koblitz, Jörn
N1 - Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE
PY - 2007
Y1 - 2007
N2 - We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.
AB - We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.
U2 - 10.1109/JMEMS.2007.904342
DO - 10.1109/JMEMS.2007.904342
M3 - Journal article
SN - 1057-7157
VL - 16
SP - 1451
EP - 1460
JO - I E E E Journal of Microelectromechanical Systems
JF - I E E E Journal of Microelectromechanical Systems
IS - 6
ER -