V-groove plasmonic waveguides fabricated by nanoimprint lithography

I. Fernandez-Cuesta, R.B. Nielsen, Alexandra Boltasseva, X. Borrisé, F. Pérez-Murano, Anders Kristensen

    Research output: Contribution to journalJournal articleResearchpeer-review


    Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.

    © 2007 American Vacuum Society
    Original languageEnglish
    JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
    Issue number6
    Pages (from-to)2649-2653
    Publication statusPublished - 2007


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