V-groove plasmonic waveguides fabricated by nanoimprint lithography

I. Fernandez-Cuesta; R.B. Nielsen; Alexandra Boltasseva; X. Borrisé; F. Pérez-Murano; Anders Kristensen

doi:10.1116/1.2779041

V-groove plasmonic waveguides fabricated by nanoimprint lithography

I. Fernandez-Cuesta, R.B. Nielsen, Alexandra Boltasseva, X. Borrisé, F. Pérez-Murano, Anders Kristensen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.

© 2007 American Vacuum Society

Original language	English
Journal	Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
Volume	25
Issue number	6
Pages (from-to)	2649-2653
ISSN	1071-1023
DOIs	https://doi.org/10.1116/1.2779041
Publication status	Published - 2007

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@article{82c7acadce84453788f3c5c15da18846,

title = "V-groove plasmonic waveguides fabricated by nanoimprint lithography",

abstract = "Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.{\textcopyright} 2007 American Vacuum Society",

author = "I. Fernandez-Cuesta and R.B. Nielsen and Alexandra Boltasseva and X. Borris{\'e} and F. P{\'e}rez-Murano and Anders Kristensen",

year = "2007",

doi = "10.1116/1.2779041",

language = "English",

volume = "25",

pages = "2649--2653",

journal = "Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - V-groove plasmonic waveguides fabricated by nanoimprint lithography

AU - Fernandez-Cuesta, I.

AU - Nielsen, R.B.

AU - Boltasseva, Alexandra

AU - Borrisé, X.

AU - Pérez-Murano, F.

AU - Kristensen, Anders

PY - 2007

Y1 - 2007

N2 - Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.© 2007 American Vacuum Society

AB - Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.© 2007 American Vacuum Society

U2 - 10.1116/1.2779041

DO - 10.1116/1.2779041

M3 - Journal article

SN - 1071-1023

VL - 25

SP - 2649

EP - 2653

JO - Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

IS - 6

ER -

V-groove plasmonic waveguides fabricated by nanoimprint lithography

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