Use of Wafer Maps in Integrated Circuit Manufacturing

C.K. Hansen, Poul Thyregod

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research

Original language	English
Title of host publication	9th European Symposium on Reliability of Electron Devices Failure Physics and Analysis.
Place of Publication	Copenhagen
Publication date	1998
Publication status	Published - 1998
Event	9th European Symposium on Reliability of Elec. Devices, Failure Physics and Analysis - Copenhagen Duration: 1 Jan 1998 → …

Conference	9th European Symposium on Reliability of Elec. Devices, Failure Physics and Analysis
City	Copenhagen
Period	01/01/1998 → …

OpenUrl availability

@inproceedings{17f4fd8c2c5d44d7ace904feb54561ad,

title = "Use of Wafer Maps in Integrated Circuit Manufacturing",

author = "C.K. Hansen and Poul Thyregod",

year = "1998",

language = "English",

booktitle = "9th European Symposium on Reliability of Electron Devices Failure Physics and Analysis.",

note = "9th European Symposium on Reliability of Elec. Devices, Failure Physics and Analysis ; Conference date: 01-01-1998",

}

TY - GEN

T1 - Use of Wafer Maps in Integrated Circuit Manufacturing

AU - Hansen, C.K.

AU - Thyregod, Poul

PY - 1998

Y1 - 1998

M3 - Article in proceedings

BT - 9th European Symposium on Reliability of Electron Devices Failure Physics and Analysis.

CY - Copenhagen

T2 - 9th European Symposium on Reliability of Elec. Devices, Failure Physics and Analysis

Y2 - 1 January 1998

ER -