Uniformity improving dummy structures for deep reactive ion etching (DRIE) processes

Søren Jensen, Jonas M. Jensen, U.J. Quaade, Ole Hansen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of SPIE
Volume5715
Publication date2005
Pages39-46
Publication statusPublished - 2005
EventSPIE: MOEMS-MEMS Micro and Nanofabrication - San Jose, United States
Duration: 22 Jan 200527 Jan 2005

Conference

ConferenceSPIE: MOEMS-MEMS Micro and Nanofabrication
CountryUnited States
CitySan Jose
Period22/01/200527/01/2005
OtherProc. volume 5715

Cite this