Uniformity improving dummy structures for deep reactive ion etching (DRIE) processes

Søren Jensen, Jonas M. Jensen, U.J. Quaade, Ole Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of SPIE
Volume	5715
Publication date	2005
Pages	39-46
Publication status	Published - 2005
Event	SPIE Photonics West MOEMS-MEMS Micro and Nanofabrication 2005 - San Jose, United States Duration: 22 Jan 2005 → 27 Jan 2005

Conference	SPIE Photonics West MOEMS-MEMS Micro and Nanofabrication 2005
Country/Territory	United States
City	San Jose
Period	22/01/2005 → 27/01/2005

OpenUrl availability

@inproceedings{4842fa50b1a041759f0ec5d826f6f609,

title = "Uniformity improving dummy structures for deep reactive ion etching (DRIE) processes",

author = "S{\o}ren Jensen and Jensen, {Jonas M.} and U.J. Quaade and Ole Hansen",

year = "2005",

language = "English",

volume = "5715",

pages = "39--46",

booktitle = "Proceedings of SPIE",

note = "SPIE Photonics West MOEMS-MEMS Micro and Nanofabrication 2005 ; Conference date: 22-01-2005 Through 27-01-2005",

}

TY - GEN

T1 - Uniformity improving dummy structures for deep reactive ion etching (DRIE) processes

AU - Jensen, Søren

AU - Jensen, Jonas M.

AU - Quaade, U.J.

AU - Hansen, Ole

PY - 2005

Y1 - 2005

M3 - Article in proceedings

VL - 5715

SP - 39

EP - 46

BT - Proceedings of SPIE

T2 - SPIE Photonics West MOEMS-MEMS Micro and Nanofabrication 2005

Y2 - 22 January 2005 through 27 January 2005

ER -