Abstract
Plasma probes are simple and inexpensive diagnostic tools which now are used even in hot and hazardous plasmas, where, however, especially the probe casings, often consisting of graphite, might suffer from sputtering, evaporation and chemical reactions between plasma particles and the probe material. An additional detrimental effect frequently detected is that the sputtered-off electrically conductive graphite re-deposits on the boron nitride material usually used for electrical isolation of the probe pins, leading to unwanted and possibly dangerous shunts to ground and/or to adjacent probes, or even short circuits.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of 2023 International Conference on Electromagnetics in Advanced Applications, ICEAA 2023 |
| Number of pages | 1 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Publication date | 2023 |
| Pages | 416-416 |
| ISBN (Electronic) | 979-8-3503-2058-9 |
| DOIs | |
| Publication status | Published - 2023 |
| Event | 25th International Conference on Electromagnetics in Advanced Applications - Venice, Italy Duration: 9 Oct 2023 → 13 Oct 2023 Conference number: 25 |
Conference
| Conference | 25th International Conference on Electromagnetics in Advanced Applications |
|---|---|
| Number | 25 |
| Country/Territory | Italy |
| City | Venice |
| Period | 09/10/2023 → 13/10/2023 |
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