Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Esko Sebastian Forsén, G. Abadal, S. Ghatnekar-Nilsson, J. Teva, J. Verd, Rasmus Kousholt Sandberg, Winnie Edith Svendsen, F. Perez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, Anja Boisen

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