Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Esko Sebastian Forsén, G. Abadal, S. Ghatnekar-Nilsson, J. Teva, J. Verd, Rasmus Kousholt Sandberg, Winnie Edith Svendsen, F. Perez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, Anja Boisen

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    Abstract

    Nanomechanical resonators have been monolithically integrated on preprocessed complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems have been designed to have resonance frequencies up to 1.5 MHz. The systems have been characterized in ambient air and vacuum conditions and display ultrasensitive mass detection in air. A mass sensitivity of 4 ag/Hz has been determined in air by placing a single glycerine drop, having a measured weight of 57 fg, at the apex of a cantilever and subsequently measuring a frequency shift of 14.8 kHz. CMOS integration enables electrostatic excitation, capacitive detection, and amplification of the resonance signal directly on the chip. (c) 2005 American Institute of Physics.
    Original languageEnglish
    JournalApplied Physics Letters
    Volume87
    Issue number4
    Pages (from-to)043507
    ISSN0003-6951
    DOIs
    Publication statusPublished - 2005

    Bibliographical note

    Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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