Ultra Soft cantilever based Sensors using Silicon based materials

Zachary James Davis, Søren Dohn, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceeding of MNE Proceedings
    Number of pages364
    Publication date2008
    Publication statusPublished - 2008
    Event34th International Conference on Micro and Nano Engineering - Athens, Greece
    Duration: 15 Sep 200818 Sep 2008
    Conference number: 34

    Conference

    Conference34th International Conference on Micro and Nano Engineering
    Number34
    CountryGreece
    CityAthens
    Period15/09/200818/09/2008

    Cite this

    Davis, Z. J., Dohn, S., & Boisen, A. (2008). Ultra Soft cantilever based Sensors using Silicon based materials. In Proceeding of MNE Proceedings