This thesis concerns the use of nano-engineered silicon waveguides for ultra-high speed optical serial data signal processing. The fundamental nonlinear properties of nano-engineered silicon waveguides are characterized. Utilizing the nonlinear effect in nano-engineered silicon waveguides for demultiplexing of 1.28 Tbit/s optical time division multiplexing data signal is investigated. A sampling system for ultra-high speed signal waveforms based on nano-engineered silicon waveguide is explored. To set up a sampling source, using carbon nanotubes for generating ultra-short pulses is pursued. A silicon microring structure is also investigated for realizing pulse rate multiplication.