Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling: Paper

Alexey Savenko; Izzet Yildiz; Dirch Hjorth Petersen; Peter Bøggild; Malte Bartenwerfer; Florian Krohs; Maria Oliva; Torsten Harzendorf

doi:10.1088/0957-4484/24/46/465701

Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling: Paper

Alexey Savenko, Izzet Yildiz, Dirch Hjorth Petersen, Peter Bøggild, Malte Bartenwerfer, Florian Krohs, Maria Oliva, Torsten Harzendorf

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

Fabrication of ultra-high aspect ratio exchangeable and customizable tips for atomic force microscopy (AFM) using lateral focused ion beam (FIB) milling is presented. While on-axis FIB milling does allow high aspect ratio (HAR) AFM tips to be defined, lateral milling gives far better flexibility in terms of defining the shape and size of the tip. Due to beam-induced deformation, it has so far not been possible to define HAR structures using lateral FIB milling. In this work we obtain aspect ratios of up to 45, with tip diameters down to 9 nm, by a deformation-suppressing writing strategy. Several FIB milling strategies for obtaining sharper tips are discussed. Finally, assembly of the HAR tips on a custom-designed probe as well as the first AFM scanning is shown.

Original language	English
Article number	465701
Journal	Nanotechnology
Volume	24
Issue number	46
Number of pages	8
ISSN	0957-4484
DOIs	https://doi.org/10.1088/0957-4484/24/46/465701
Publication status	Published - 2013

Access to Document

10.1088/0957-4484/24/46/465701

OpenUrl availability

Full text

Cite this

@article{292df60a2869468e83717072c812243b,

title = "Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling: Paper",

abstract = "Fabrication of ultra-high aspect ratio exchangeable and customizable tips for atomic force microscopy (AFM) using lateral focused ion beam (FIB) milling is presented. While on-axis FIB milling does allow high aspect ratio (HAR) AFM tips to be defined, lateral milling gives far better flexibility in terms of defining the shape and size of the tip. Due to beam-induced deformation, it has so far not been possible to define HAR structures using lateral FIB milling. In this work we obtain aspect ratios of up to 45, with tip diameters down to 9 nm, by a deformation-suppressing writing strategy. Several FIB milling strategies for obtaining sharper tips are discussed. Finally, assembly of the HAR tips on a custom-designed probe as well as the first AFM scanning is shown.",

author = "Alexey Savenko and Izzet Yildiz and Petersen, {Dirch Hjorth} and Peter B{\o}ggild and Malte Bartenwerfer and Florian Krohs and Maria Oliva and Torsten Harzendorf",

year = "2013",

doi = "10.1088/0957-4484/24/46/465701",

language = "English",

volume = "24",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

number = "46",

}

TY - JOUR

T1 - Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

T2 - Paper

AU - Savenko, Alexey

AU - Yildiz, Izzet

AU - Petersen, Dirch Hjorth

AU - Bøggild, Peter

AU - Bartenwerfer, Malte

AU - Krohs, Florian

AU - Oliva, Maria

AU - Harzendorf, Torsten

PY - 2013

Y1 - 2013

N2 - Fabrication of ultra-high aspect ratio exchangeable and customizable tips for atomic force microscopy (AFM) using lateral focused ion beam (FIB) milling is presented. While on-axis FIB milling does allow high aspect ratio (HAR) AFM tips to be defined, lateral milling gives far better flexibility in terms of defining the shape and size of the tip. Due to beam-induced deformation, it has so far not been possible to define HAR structures using lateral FIB milling. In this work we obtain aspect ratios of up to 45, with tip diameters down to 9 nm, by a deformation-suppressing writing strategy. Several FIB milling strategies for obtaining sharper tips are discussed. Finally, assembly of the HAR tips on a custom-designed probe as well as the first AFM scanning is shown.

AB - Fabrication of ultra-high aspect ratio exchangeable and customizable tips for atomic force microscopy (AFM) using lateral focused ion beam (FIB) milling is presented. While on-axis FIB milling does allow high aspect ratio (HAR) AFM tips to be defined, lateral milling gives far better flexibility in terms of defining the shape and size of the tip. Due to beam-induced deformation, it has so far not been possible to define HAR structures using lateral FIB milling. In this work we obtain aspect ratios of up to 45, with tip diameters down to 9 nm, by a deformation-suppressing writing strategy. Several FIB milling strategies for obtaining sharper tips are discussed. Finally, assembly of the HAR tips on a custom-designed probe as well as the first AFM scanning is shown.

U2 - 10.1088/0957-4484/24/46/465701

DO - 10.1088/0957-4484/24/46/465701

M3 - Journal article

C2 - 24149369

SN - 0957-4484

VL - 24

JO - Nanotechnology

JF - Nanotechnology

IS - 46

M1 - 465701

ER -

Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling: Paper

Abstract

Access to Document

OpenUrl availability

Fingerprint

Cite this