Ultra-coherent fundamental mode mechanical resonators designed using topology optimization

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Abstract

Topology optimization has been used to optimize the quality factor × frequency product of the fundamental mode of silicon nitride based membranes. A factor of 2.5 enhancement was experimentally demonstrated, showing the potential for topology optimization to revolutionize designs of membranes.
Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics - Proceedings
PublisherIEEE
Publication date2021
ISBN (Electronic)978-1-943580-91-0
Publication statusPublished - 2021
Event2021 Conference on Lasers and Electro-Optics (CLEO) - Online, San Jose, United States
Duration: 9 May 202114 May 2021
http://www.cleoconference.org

Conference

Conference2021 Conference on Lasers and Electro-Optics (CLEO)
LocationOnline
Country/TerritoryUnited States
CitySan Jose
Period09/05/202114/05/2021
Internet address

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