Abstract
The present disclosure relates to a method of manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material, the method comprising: i. Providing a growth stack comprising a growth substrate and a two-dimensional material layer; ii. Applying an intercalating solution, to the growth stack; iii. Applying a transfer layer comprising a water-soluble polymer film, to the growth stack; iv. Delaminating the water-soluble polymer film together with the two-dimensional material layer, thereby obtaining a delaminated film, from the growth substrate; and v. Repeating steps i.-iv. a number of times, wherein the delaminated film is used as the transfer layer; thereby manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material.
| Original language | English |
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| IPC | H01L 21/ 683 A I |
| Patent number | WO2022129049 |
| Filing date | 14/12/2020 |
| Country/Territory | International Bureau of the World Intellectual Property Organization (WIPO) |
| Priority date | 14/12/2020 |
| Priority number | EP20200213739 |
| Publication status | Published - 23 Jun 2022 |