Two-dimensional material and heterostructures on an intermediate polymer transfer layer and their fabrication

Abhay Shivayogimath (Inventor), Peter Bøggild (Inventor), Timothy John Booth (Inventor)

Research output: Patent

63 Downloads (Pure)

Abstract

The present disclosure relates to a method of manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material, the method comprising: i. Providing a growth stack comprising a growth substrate and a two-dimensional material layer; ii. Applying an intercalating solution, to the growth stack; iii. Applying a transfer layer comprising a water-soluble polymer film, to the growth stack; iv. Delaminating the water-soluble polymer film together with the two-dimensional material layer, thereby obtaining a delaminated film, from the growth substrate; and v. Repeating steps i.-iv. a number of times, wherein the delaminated film is used as the transfer layer; thereby manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material.

Original languageEnglish
IPCH01L 21/ 683 A I
Patent numberWO2022129049
Filing date14/12/2020
Country/TerritoryInternational Bureau of the World Intellectual Property Organization (WIPO)
Priority date14/12/2020
Priority numberEP20200213739
Publication statusPublished - 23 Jun 2022

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