Tunable microwave phase shifter based on silicon-on-insulator microring resonator

Minhao Pu, Liu Liu, Weiqi Xue, Yunhong Ding, Lars Hagedorn Frandsen, Haiyan Ou, Kresten Yvind, Jørn Märcher Hvam

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We demonstrate microwave phase shifters based on electrically tunable silicon-on-insulator microring resonators (MRRs). MRRs with different quality factors are fabricated and tested. A continuously tunable phase shift of up to 336 at a microwave frequency of 40 GHz is obtained using a high-quality-factor ( 28 000) MRR with only 1.6-mW power consumption. A quasi-linear phase shift in the range of 0 –204 at 40 GHz with a radio-frequency power variation less than 1.3 dB is also achieved by using a lower-quality-factor MRR.
Original languageEnglish
JournalI E E E Photonics Technology Letters
Issue number12
Pages (from-to)869-871
Publication statusPublished - 2010

Bibliographical note

Copyright: 2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE


  • Integrated optics devices
  • silicon microring resonator (MRR)
  • radio-frequency (RF) photonics
  • microwave photonics


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