Tunable micro-fluidic multi-component micro-lens system with integrated actuator

Daniel Mader; David Maximilian Marhöfer; Philipp Waibel; Hans Zappe; Andreas Seifert

doi:10.1109/MEMSYS.2010.5442285

Tunable micro-fluidic multi-component micro-lens system with integrated actuator

Daniel Mader, David Maximilian Marhöfer, Philipp Waibel, Hans Zappe, Andreas Seifert

University of Freiburg

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Abstract

A design approach and new manufacturing technique for a novel type of stacked fluidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.

Original language	English
Publication date	2010
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442285
Publication status	Published - 2010
Externally published	Yes
Event	2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong Duration: 24 Jan 2010 → 28 Jan 2010

Conference

Conference	2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Country/Territory	Hong Kong
City	Wanchai
Period	24/01/2010 → 28/01/2010

Access to Document

10.1109/MEMSYS.2010.5442285

OpenUrl availability

Full text

Cite this

@conference{d7f568f963ef4707862f5b6d08fa3a8d,

title = "Tunable micro-fluidic multi-component micro-lens system with integrated actuator",

abstract = "A design approach and new manufacturing technique for a novel type of stacked fluidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this {"}micro-optical construction kit{"} are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.",

author = "Daniel Mader and Marh{\"o}fer, {David Maximilian} and Philipp Waibel and Hans Zappe and Andreas Seifert",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442285",

language = "English",

note = "2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 24-01-2010 Through 28-01-2010",

}

Tunable micro-fluidic multi-component micro-lens system with integrated actuator. / Mader, Daniel; Marhöfer, David Maximilian; Waibel, Philipp et al.
2010. Abstract from 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong.

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

TY - ABST

T1 - Tunable micro-fluidic multi-component micro-lens system with integrated actuator

AU - Mader, Daniel

AU - Marhöfer, David Maximilian

AU - Waibel, Philipp

AU - Zappe, Hans

AU - Seifert, Andreas

PY - 2010

Y1 - 2010

N2 - A design approach and new manufacturing technique for a novel type of stacked fluidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.

AB - A design approach and new manufacturing technique for a novel type of stacked fluidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.

U2 - 10.1109/MEMSYS.2010.5442285

DO - 10.1109/MEMSYS.2010.5442285

M3 - Conference abstract for conference

T2 - 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 24 January 2010 through 28 January 2010

ER -

Tunable micro-fluidic multi-component micro-lens system with integrated actuator

Abstract

Conference

Access to Document

OpenUrl availability

Fingerprint

Cite this