Tunable micro-fluidic multi-component micro-lens system with integrated actuator

Daniel Mader, David Maximilian Marhöfer, Philipp Waibel, Hans Zappe, Andreas Seifert

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Abstract

A design approach and new manufacturing technique for a novel type of stacked fluidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.
Original languageEnglish
Publication date2010
Number of pages4
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong
Duration: 24 Jan 201028 Jan 2010

Conference

Conference2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
CountryHong Kong
CityWanchai
Period24/01/201028/01/2010

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