Triaxial MEMS accelerometer with screen printed PZT thick film

Christian Carstensen Hindrichsen; Ninia Sejersen Almind; Simon Hedegaard Brodersen; Rasmus Lou-Møller; Karsten Hansen; Erik Vilain Thomsen

doi:10.1007/s10832-010-9597-4

Triaxial MEMS accelerometer with screen printed PZT thick film

Christian Carstensen Hindrichsen, Ninia Sejersen Almind, Simon Hedegaard Brodersen, Rasmus Lou-Møller, Karsten Hansen, Erik Vilain Thomsen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 mu m. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.

Original language	English
Journal	Journal of Electroceramics
Volume	25
Issue number	2-4
Pages (from-to)	108-115
ISSN	1385-3449
DOIs	https://doi.org/10.1007/s10832-010-9597-4
Publication status	Published - 2010

Keywords

PZT thick film
Piezoelectric effect
MEMS device
Characterization
Triaxial accelerometer
Fabrication process flow
Screen printing

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10.1007/s10832-010-9597-4

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title = "Triaxial MEMS accelerometer with screen printed PZT thick film",

abstract = "Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 mu m. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.",

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author = "Hindrichsen, {Christian Carstensen} and Almind, {Ninia Sejersen} and Brodersen, {Simon Hedegaard} and Rasmus Lou-M{\o}ller and Karsten Hansen and Thomsen, {Erik Vilain}",

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AU - Hindrichsen, Christian Carstensen

AU - Almind, Ninia Sejersen

AU - Brodersen, Simon Hedegaard

AU - Lou-Møller, Rasmus

AU - Hansen, Karsten

AU - Thomsen, Erik Vilain

PY - 2010

Y1 - 2010

N2 - Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 mu m. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.

AB - Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 mu m. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.

KW - PZT thick film

KW - Piezoelectric effect

KW - MEMS device

KW - Characterization

KW - Triaxial accelerometer

KW - Fabrication process flow

KW - Screen printing

U2 - 10.1007/s10832-010-9597-4

DO - 10.1007/s10832-010-9597-4

M3 - Journal article

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EP - 115

JO - Journal of Electroceramics

JF - Journal of Electroceramics

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ER -

Triaxial MEMS accelerometer with screen printed PZT thick film

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Keywords

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