Trenches for building blocks of advanced planar components

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Abstract

Trenches are fundamental structures used to build advanced optical planar waveguide components. In this letter, the fabrication of trenches across silica-on-silicon waveguides using inductively coupled plasma etching is presented. These trenches were etched deep into the silicon substrate and their widths were varied between 24 and 100>tex/textex/tex
Original languageEnglish
JournalI E E E Photonics Technology Letters
Volume16
Issue number5
Pages (from-to)1334-1336
ISSN1041-1135
DOIs
Publication statusPublished - 2004

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