Transmittance enhancement in 6H-SiC with nanocone structures

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Enhanced transmittance of 6H-SiC with nanocone structures were achieved by using self-assembled Au nanoparticles as etching mask. HF passivation process of nanocone structures was investigated to further improve the transmittance. The max transmittance of structured SiC is significantly improved by 10%.
Original languageEnglish
Publication date2015
Publication statusPublished - 2015
Event3rd European-Asian workshop on Light-Emitting Diodes - Lyngby, Denmark
Duration: 5 Mar 20156 Mar 2015
Conference number: 3

Workshop

Workshop3rd European-Asian workshop on Light-Emitting Diodes
Number3
CountryDenmark
CityLyngby
Period05/03/201506/03/2015

    Research areas

  • Nanocone, Transmittance, HF passivation

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