Enhanced transmittance of 6H-SiC with nanocone structures were achieved by using self-assembled Au nanoparticles as etching mask. HF passivation process of nanocone structures was investigated to further improve the transmittance. The max transmittance of structured SiC is significantly improved by 10%.
|Publication status||Published - 2015|
|Event||3rd European-Asian workshop on Light-Emitting Diodes - Lyngby, Denmark|
Duration: 5 Mar 2015 → 6 Mar 2015
Conference number: 3
|Workshop||3rd European-Asian workshop on Light-Emitting Diodes|
|Period||05/03/2015 → 06/03/2015|
- HF passivation