Transmittance enhancement in 6H-SiC with nanocone structures

Weifang Lu, Yiyu Ou, Haiyan Ou

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    Abstract

    Enhanced transmittance of 6H-SiC with nanocone structures were achieved by using self-assembled Au nanoparticles as etching mask. HF passivation process of nanocone structures was investigated to further improve the transmittance. The max transmittance of structured SiC is significantly improved by 10%.
    Original languageEnglish
    Publication date2015
    Publication statusPublished - 2015
    Event3rd European-Asian workshop on Light-Emitting Diodes - Lyngby, Denmark
    Duration: 5 Mar 20156 Mar 2015
    Conference number: 3

    Workshop

    Workshop3rd European-Asian workshop on Light-Emitting Diodes
    Number3
    Country/TerritoryDenmark
    CityLyngby
    Period05/03/201506/03/2015

    Keywords

    • Nanocone
    • Transmittance
    • HF passivation

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