Abstract
Enhanced transmittance of 6H-SiC with nanocone
structures were achieved by using self-assembled Au
nanoparticles as etching mask. HF passivation process of
nanocone structures was investigated to further improve the
transmittance. The max transmittance of structured SiC is
significantly improved by 10%.
Original language | English |
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Publication date | 2015 |
Publication status | Published - 2015 |
Event | 3rd European-Asian workshop on Light-Emitting Diodes - Lyngby, Denmark Duration: 5 Mar 2015 → 6 Mar 2015 Conference number: 3 |
Workshop
Workshop | 3rd European-Asian workshop on Light-Emitting Diodes |
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Number | 3 |
Country/Territory | Denmark |
City | Lyngby |
Period | 05/03/2015 → 06/03/2015 |
Keywords
- Nanocone
- Transmittance
- HF passivation