Transition from linear to nonlinear sputtering of solid xenon

L. Dutkiewicz, R. Pedrys, Jørgen Schou, K. Kremer

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    Self-sputtering of solid xenon has been studied with molecular dynamics simulations as a model system for the transition from dominantly linear to strongly nonlinear effects. The simulation covered the projectile energy range from 20 to 750 eV. Within a relatively narrow range from 30 to 250 eV, nonlinear features such as high collision densities in the sputtering volume, amorphization of the crystalline structure, and an enhanced emission of low-energy atoms occur gradually.
    Original languageEnglish
    JournalPhysical Review Letters
    Volume75
    Issue number7
    Pages (from-to)1407-1410
    ISSN0031-9007
    DOIs
    Publication statusPublished - 1995

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