Abstract
Self-sputtering of solid xenon has been studied with molecular dynamics simulations as a model system for the transition from dominantly linear to strongly nonlinear effects. The simulation covered the projectile energy range from 20 to 750 eV. Within a relatively narrow range from 30 to 250 eV, nonlinear features such as high collision densities in the sputtering volume, amorphization of the crystalline structure, and an enhanced emission of low-energy atoms occur gradually.
Original language | English |
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Journal | Physical Review Letters |
Volume | 75 |
Issue number | 7 |
Pages (from-to) | 1407-1410 |
ISSN | 0031-9007 |
DOIs | |
Publication status | Published - 1995 |