Traceability of Dimensional Measurements using the Scanning Electron Microscope

Leonardo De Chiffre, Paolo Bariani, Hans Nørgaard Hansen, Andy Horsewell

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.
    Original languageEnglish
    Title of host publicationProc. of 4th euspen Int. Conference
    Place of PublicationKempston
    PublisherLG Digital
    Publication date2004
    Publication statusPublished - 2004
    Event4th EUSPEN International Conference - Glasgow, United Kingdom
    Duration: 30 May 20043 Jun 2004
    Conference number: 4

    Conference

    Conference4th EUSPEN International Conference
    Number4
    CountryUnited Kingdom
    CityGlasgow
    Period30/05/200403/06/2004

    Cite this

    De Chiffre, L., Bariani, P., Hansen, H. N., & Horsewell, A. (2004). Traceability of Dimensional Measurements using the Scanning Electron Microscope. In Proc. of 4th euspen Int. Conference Kempston: LG Digital.
    De Chiffre, Leonardo ; Bariani, Paolo ; Hansen, Hans Nørgaard ; Horsewell, Andy. / Traceability of Dimensional Measurements using the Scanning Electron Microscope. Proc. of 4th euspen Int. Conference. Kempston : LG Digital, 2004.
    @inproceedings{95451d3fd59e49469d76d02ba50b317f,
    title = "Traceability of Dimensional Measurements using the Scanning Electron Microscope",
    abstract = "its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.",
    author = "{De Chiffre}, Leonardo and Paolo Bariani and Hansen, {Hans N{\o}rgaard} and Andy Horsewell",
    year = "2004",
    language = "English",
    booktitle = "Proc. of 4th euspen Int. Conference",
    publisher = "LG Digital",

    }

    De Chiffre, L, Bariani, P, Hansen, HN & Horsewell, A 2004, Traceability of Dimensional Measurements using the Scanning Electron Microscope. in Proc. of 4th euspen Int. Conference. LG Digital, Kempston, 4th EUSPEN International Conference, Glasgow, United Kingdom, 30/05/2004.

    Traceability of Dimensional Measurements using the Scanning Electron Microscope. / De Chiffre, Leonardo; Bariani, Paolo; Hansen, Hans Nørgaard; Horsewell, Andy.

    Proc. of 4th euspen Int. Conference. Kempston : LG Digital, 2004.

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    TY - GEN

    T1 - Traceability of Dimensional Measurements using the Scanning Electron Microscope

    AU - De Chiffre, Leonardo

    AU - Bariani, Paolo

    AU - Hansen, Hans Nørgaard

    AU - Horsewell, Andy

    PY - 2004

    Y1 - 2004

    N2 - its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.

    AB - its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.

    M3 - Article in proceedings

    BT - Proc. of 4th euspen Int. Conference

    PB - LG Digital

    CY - Kempston

    ER -

    De Chiffre L, Bariani P, Hansen HN, Horsewell A. Traceability of Dimensional Measurements using the Scanning Electron Microscope. In Proc. of 4th euspen Int. Conference. Kempston: LG Digital. 2004