Traceability of Dimensional Measurements using the Scanning Electron Microscope

Leonardo De Chiffre; Paolo Bariani; Hans Nørgaard Hansen; Andy Horsewell

Traceability of Dimensional Measurements using the Scanning Electron Microscope

Leonardo De Chiffre, Paolo Bariani, Hans Nørgaard Hansen, Andy Horsewell

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.

Original language	English
Title of host publication	Proc. of 4th euspen Int. Conference
Place of Publication	Kempston
Publisher	LG Digital
Publication date	2004
Publication status	Published - 2004
Event	4th EUSPEN International Conference - Glasgow, United Kingdom Duration: 30 May 2004 → 3 Jun 2004 Conference number: 4

Conference

Conference	4th EUSPEN International Conference
Number	4
Country	United Kingdom
City	Glasgow
Period	30/05/2004 → 03/06/2004

Access to Document

http://www.ipl.dtu.dk/publikation/8306/dk/

Fingerprint Dive into the research topics of 'Traceability of Dimensional Measurements using the Scanning Electron Microscope'. Together they form a unique fingerprint.

Cite this

@inproceedings{95451d3fd59e49469d76d02ba50b317f,

title = "Traceability of Dimensional Measurements using the Scanning Electron Microscope",

abstract = "its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.",

author = "{De Chiffre}, Leonardo and Paolo Bariani and Hansen, {Hans N{\o}rgaard} and Andy Horsewell",

year = "2004",

language = "English",

booktitle = "Proc. of 4th euspen Int. Conference",

publisher = "LG Digital",

note = "4th EUSPEN International Conference ; Conference date: 30-05-2004 Through 03-06-2004",

}

TY - GEN

T1 - Traceability of Dimensional Measurements using the Scanning Electron Microscope

AU - De Chiffre, Leonardo

AU - Bariani, Paolo

AU - Hansen, Hans Nørgaard

AU - Horsewell, Andy

N1 - Conference code: 4

PY - 2004

Y1 - 2004

N2 - its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.

AB - its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.

M3 - Article in proceedings

BT - Proc. of 4th euspen Int. Conference

PB - LG Digital

CY - Kempston

T2 - 4th EUSPEN International Conference

Y2 - 30 May 2004 through 3 June 2004

ER -