Abstract
| Original language | English |
|---|---|
| Title of host publication | Proc. of 4th euspen Int. Conference |
| Place of Publication | Kempston |
| Publisher | LG Digital |
| Publication date | 2004 |
| Publication status | Published - 2004 |
| Event | 4th EUSPEN International Conference - Glasgow, United Kingdom Duration: 30 May 2004 → 3 Jun 2004 Conference number: 4 |
Conference
| Conference | 4th EUSPEN International Conference |
|---|---|
| Number | 4 |
| Country | United Kingdom |
| City | Glasgow |
| Period | 30/05/2004 → 03/06/2004 |
Cite this
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Traceability of Dimensional Measurements using the Scanning Electron Microscope. / De Chiffre, Leonardo; Bariani, Paolo; Hansen, Hans Nørgaard; Horsewell, Andy.
Proc. of 4th euspen Int. Conference. Kempston : LG Digital, 2004.Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review
TY - GEN
T1 - Traceability of Dimensional Measurements using the Scanning Electron Microscope
AU - De Chiffre, Leonardo
AU - Bariani, Paolo
AU - Hansen, Hans Nørgaard
AU - Horsewell, Andy
PY - 2004
Y1 - 2004
N2 - its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.
AB - its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.
M3 - Article in proceedings
BT - Proc. of 4th euspen Int. Conference
PB - LG Digital
CY - Kempston
ER -