Traceability of Dimensional Measurements using the Scanning Electron Microscope

Leonardo De Chiffre, Paolo Bariani, Hans Nørgaard Hansen, Andy Horsewell

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    its unique combination of three imaging properties: • Lateral ultimate resolution down to 2 nm • Large range of possible magnification levels ranging from a few hundred times to hundred thousand times magnification • Large depth of field Topography reconstruction with this instrument and photogrammetric techniques has been known for a long time [1] [2]. Nowadays, the availability of digital SEMs and the advances in computer technology have made it possible to implement such algorithms to the reconstruction of continuous three dimensional data sets. In this work, a theoretical and experimental investigation is presented that addresses the performance of 3D topography calculation based on secondary electron imaging and the stereo-pair technique.
    Original languageEnglish
    Title of host publicationProc. of 4th euspen Int. Conference
    Place of PublicationKempston
    PublisherLG Digital
    Publication date2004
    Publication statusPublished - 2004
    Event4th EUSPEN International Conference - Glasgow, United Kingdom
    Duration: 30 May 20043 Jun 2004
    Conference number: 4

    Conference

    Conference4th EUSPEN International Conference
    Number4
    CountryUnited Kingdom
    CityGlasgow
    Period30/05/200403/06/2004

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