Towards Nanoscale 3d Printing of Pdms-Like Polymers

Anpan Han*, Ding Zhao, Liyun Liu, Anne Ladegaard Skov

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

Inside a vacuum chamber, we froze hexamethyldisiloxane vapors into thin-films of ice. We then patterned and crossed-linked the ice-film into silicon containing polymers by electron beam exposure. The unreacted hexamethyldisiloxane is vaporized at room temperature, and the cross-linked siloxane remains as a stable thin-film on the supporting silicon substrate. The chemical composition of the cross-linked siloxane is similar to polydimethylsiloxane (PDMS) elastomer, which is used in many transducers and sensors applications.
Original languageEnglish
Title of host publication Proceedings of the 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
PublisherIEEE
Publication date2019
Pages1724-1727
ISBN (Electronic)978-1-5386-8104-6
DOIs
Publication statusPublished - 2019
Event20th International Conference on Solid-state Sensors, Actuators and Microsystems and Eurosensors XXXIII - Berlin, Denmark
Duration: 23 Jun 201927 Jun 2019

Conference

Conference20th International Conference on Solid-state Sensors, Actuators and Microsystems and Eurosensors XXXIII
CountryDenmark
CityBerlin
Period23/06/201927/06/2019

Keywords

  • Organic ice
  • Electron beam
  • PDMS
  • 3D printing
  • Siloxanes
  • Additive manufacturing

Cite this

Han, A., Zhao, D., Liu, L., & Skov, A. L. (2019). Towards Nanoscale 3d Printing of Pdms-Like Polymers. In Proceedings of the 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (pp. 1724-1727). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808628