Towards nanoimprint lithography on free-form surfaces: A global/local modelling approach for predicting the deformation of the flexible stamp

Mads Rostgaard Sonne, K. Smistrup, Jesper Henri Hattel

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    Original languageEnglish
    Publication date2014
    Number of pages2
    Publication statusPublished - 2014
    Event 13th International Conference on Nanoimprint and Nanoprint Technology - ANA Crowne Plaza Kyoto, Kyoto, Japan
    Duration: 22 Oct 201424 Oct 2014
    Conference number: 13
    http://nanoimprint.jp/nnt2014/

    Conference

    Conference 13th International Conference on Nanoimprint and Nanoprint Technology
    Number13
    Location ANA Crowne Plaza Kyoto
    Country/TerritoryJapan
    CityKyoto
    Period22/10/201424/10/2014
    Internet address

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