Towards nanoimprint lithography on free-form surfaces: A global/local modelling approach for predicting the deformation of the flexible stamp

Mads Rostgaard Sonne, K. Smistrup, Jesper Henri Hattel

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2014
Number of pages2
Publication statusPublished - 2014
Event 13th International Conference on Nanoimprint and Nanoprint Technology - ANA Crowne Plaza Kyoto, Kyoto, Japan
Duration: 22 Oct 201424 Oct 2014
Conference number: 13
http://nanoimprint.jp/nnt2014/

Conference

Conference 13th International Conference on Nanoimprint and Nanoprint Technology
Number13
Location ANA Crowne Plaza Kyoto
CountryJapan
CityKyoto
Period22/10/201424/10/2014
Internet address

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