Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

Sadegh Yazdi; Takeshi Kasama; D. W. McComb; A. C. Harrison; Rafal E. Dunin-Borkowski

doi:10.1017/S1431927613008787

Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

Sadegh Yazdi
, Takeshi Kasama
, D. W. McComb
, A. C. Harrison
, Rafal E. Dunin-Borkowski

Research output: Contribution to journal › Conference abstract in journal › Research

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Original language	English
Journal	Microscopy and Microanalysis
Volume	19
Issue number	Supplement S2
Pages (from-to)	1358-1359
ISSN	1431-9276
DOIs	https://doi.org/10.1017/S1431927613008787
Publication status	Published - 2013
Event	Microscopy and Microanalysis 2013 - Indiana Convention Center, Indianapolis, United States Duration: 4 Aug 2013 → 8 Aug 2013 http://microscopy.org/mandm/2013/

Conference

Conference	Microscopy and Microanalysis 2013
Location	Indiana Convention Center
Country/Territory	United States
City	Indianapolis
Period	04/08/2013 → 08/08/2013
Internet address	http://microscopy.org/mandm/2013/

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10.1017/S1431927613008787

S1431927613008787aFinal published version, 438 KB

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Cite this

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title = "Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography",

author = "Sadegh Yazdi and Takeshi Kasama and McComb, \{D. W.\} and Harrison, \{A. C.\} and Dunin-Borkowski, \{Rafal E.\}",

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language = "English",

volume = "19",

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journal = "Microscopy and Microanalysis",

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publisher = "Oxford University Press",

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TY - ABST

T1 - Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

AU - Yazdi, Sadegh

AU - Kasama, Takeshi

AU - McComb, D. W.

AU - Harrison, A. C.

AU - Dunin-Borkowski, Rafal E.

PY - 2013

Y1 - 2013

U2 - 10.1017/S1431927613008787

DO - 10.1017/S1431927613008787

M3 - Conference abstract in journal

SN - 1431-9276

VL - 19

SP - 1358

EP - 1359

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - Supplement S2

T2 - Microscopy and Microanalysis 2013

Y2 - 4 August 2013 through 8 August 2013

ER -