Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

Sadegh Yazdi; Takeshi Kasama; D. W. McComb; A. C. Harrison; Rafal E. Dunin-Borkowski

doi:10.1017/S1431927613008787

Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

Sadegh Yazdi, Takeshi Kasama, D. W. McComb, A. C. Harrison, Rafal E. Dunin-Borkowski

Research output: Contribution to journal › Conference abstract in journal › Research

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Original language	English
Journal	Microscopy and Microanalysis
Volume	19
Issue number	Supplement S2
Pages (from-to)	1358-1359
ISSN	1431-9276
DOIs	https://doi.org/10.1017/S1431927613008787
Publication status	Published - 2013
Event	Microscopy and Microanalysis 2013 - Indiana Convention Center, Indianapolis, United States Duration: 4 Aug 2013 → 8 Aug 2013 http://microscopy.org/mandm/2013/

Conference

Conference	Microscopy and Microanalysis 2013
Location	Indiana Convention Center
Country/Territory	United States
City	Indianapolis
Period	04/08/2013 → 08/08/2013
Internet address	http://microscopy.org/mandm/2013/

Access to Document

10.1017/S1431927613008787

S1431927613008787aFinal published version, 438 KB

Cite this

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title = "Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography",

author = "Sadegh Yazdi and Takeshi Kasama and McComb, {D. W.} and Harrison, {A. C.} and Dunin-Borkowski, {Rafal E.}",

year = "2013",

doi = "10.1017/S1431927613008787",

language = "English",

volume = "19",

pages = "1358--1359",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Cambridge University Press",

number = "Supplement S2",

note = "Microscopy and Microanalysis 2013, MandM ; Conference date: 04-08-2013 Through 08-08-2013",

url = "http://microscopy.org/mandm/2013/",

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Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography. / Yazdi, Sadegh; Kasama, Takeshi; McComb, D. W.; Harrison, A. C.; Dunin-Borkowski, Rafal E.

In: Microscopy and Microanalysis, Vol. 19, No. Supplement S2, 2013, p. 1358-1359.

Research output: Contribution to journal › Conference abstract in journal › Research

TY - ABST

T1 - Towards Mapping Electrostatic Potentials in Semiconductor Devices Under Working Conditions Using Off-Axis Electron Holography

AU - Yazdi, Sadegh

AU - Kasama, Takeshi

AU - McComb, D. W.

AU - Harrison, A. C.

AU - Dunin-Borkowski, Rafal E.

PY - 2013

Y1 - 2013

U2 - 10.1017/S1431927613008787

DO - 10.1017/S1431927613008787

M3 - Conference abstract in journal

VL - 19

SP - 1358

EP - 1359

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

SN - 1431-9276

IS - Supplement S2

T2 - Microscopy and Microanalysis 2013

Y2 - 4 August 2013 through 8 August 2013

ER -