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Abstract
This thesis deals with modeling, design, fabrication and characterization of
vertically electrically pumped photonic crystal light-emitting devices. For
this purpose a new material platform of III-V semiconductors on silicon
has been developed. The devices fabricated on this platform can be used
as optical interconnects, where compatibility with Complementary Metal
Oxide Semiconductor (CMOS) technology is required.
The first part of this work is dedicated to modeling and simulations of
electrically pumped photonic crystal nanolasers with diverse material configurations
and different concepts for electrical injection. The analysis of
the models is conducted with focus on laser performances, energy efficiency,
and thermal properties.
The second part of this thesis deals with design, fabrication and characterization
of vertically electrically pumped photonic crystal light-emitting
devices. The devices consist of a double heterostructure Photonic Crystal
(PhC) membrane with line-defect waveguide for the optical configuration
and a pillar under the membrane as a path for vertical electrical injection.
The fabricated devices have been tested under electrical injection and photonic
crystal light-emitting diodes (LEDs) have been demonstrated. Furthermore
the characterization of the devices under optical injection resulted
in lasing emission.
The main result of this work is the realization of vertically electrically
pumped photonic crystal light-emitting devices on a new material platform.
This result has been achieved through a long and complicated cleanroom
fabrication process. The processing includes the development of a mutual
SiO2-benzocyclobutene (BCB) planarization with approximately the same
dry etch rate for SiO2 and BCB and double-side processing through adhesive
BCB bonding to silicon. The use of chip-mark alignment had to be
employed for the second electron-beam lithography of the PhC pattern, in
order to compensate for the discovered random sample distortion after the
bonding step.
Original language | English |
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Publisher | DTU Fotonik |
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Number of pages | 162 |
Publication status | Published - 2015 |
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Dive into the research topics of 'Towards Electrically Pumped Nanolasers for Terabit Communication.'. Together they form a unique fingerprint.Projects
- 1 Finished
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Electrically pumped nanolaser for terabit communication
Lupi, A. (PhD Student), Yvind, K. (Main Supervisor), Chung, I.-S. (Supervisor), Oxenlowe, L. K. (Examiner), Birkedal, D. (Examiner) & Roelkens, G. (Examiner)
Eksternt finansieret virksomhed
15/03/2012 → 17/02/2016
Project: PhD