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Towards Carrier Profiling in Nanometer-wide Si Fins with Micro Four-Point Probe
Steven Folkersma*, Janusz Bogdanowicz, Andreas Schulze, Paola Favia, Alexis Franquet, Valentina Spampinato, Dirch Hjorth Petersen, Ole Hansen, Henrik Hartmann Henrichsen, Peter Folmer Nielsen, Lior Shiv, Wilfried Vandervorst
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review