Touch mode micromachined capacitive pressure sensor with signal conditioning electronics

Giulio Fragiacomo, Gert F. Eriksen, Carsten Christensen, Erik Vilain Thomsen

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    Abstract

    In the last decades, pressure sensors have been one of the greatest successes of the MEMS industry. Many companies are using them in a variety of applications from the automotive to the environmental field. Currently piezoresistive pressure sensors are the most developed, and a well established technology to design and fabricate these sensors has been implemented. Capacitive pressure sensing, on the other hand, is still an open and really promising field. Results Capacitive microsensors were designed and fabricated (Fig. 1) and an analytical model for touch mode regime, which fitted accurately the measurements done on the devices, was investigated. Fabrication was carried on at Danchip cleanrooms where fusion bonding was used in order to obtain a thin silicon plate on top of a sealed vacuum cavity (Fig. 2). A viable signal conditioning scheme for capacitive pressure sensing was simulated and implemented. A measurement setup was arranged and tested for accuracy and reliability with respect to hysteresis. Finally, designs with different radii of the top plate were characterized by a capacitance versus pressure curve at different frequencies and temperatures (Fig. 3). Industrial possibilities Energy saving systems is one of the key challenges nowadays. In this context, house heating is a priority for environmental issues. For this reason, the possibilities of using a low power consumption technique, such as capacitive pressure sensing, in harsh environments is a concrete market opportunity. Our aim is therefore to develop new technologies based on capacitive sensing to be able to fulfil future requirements in this field.
    Original languageEnglish
    Title of host publicationproceedings of: Micronano Systems Workshop 2010
    Publication date2010
    Publication statusPublished - 2010
    EventMicronano System Workshop 2010 - Stockholm, Sweden
    Duration: 1 Jan 2010 → …

    Conference

    ConferenceMicronano System Workshop 2010
    CityStockholm, Sweden
    Period01/01/2010 → …

    Cite this

    Fragiacomo, G., Eriksen, G. F., Christensen, C., & Thomsen, E. V. (2010). Touch mode micromachined capacitive pressure sensor with signal conditioning electronics. In proceedings of: Micronano Systems Workshop 2010 http://www.msw2010.org/