Topology optimized RF MEMS switches

M. A. Philippine; H. Zareie; Ole Sigmund; G. M. Rebeiz; T. W. Kenny

doi:10.1109/Transducers.2013.6627308

Topology optimized RF MEMS switches

M. A. Philippine
, H. Zareie
, Ole Sigmund
, G. M. Rebeiz
, T. W. Kenny

Stanford University
University of California at San Diego

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology optimization for an RF MEM capacitive switch. Extensive experimental data confirms that the switches perform as designed by the optimizations, and that our simulation models are accurate. A subset of measurements are presented here. Broader results have been submitted in full journal format.

Original language	English
Title of host publication	2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	IEEE
Publication date	2013
Pages	2477-2480
ISBN (Print)	978-1-4673-5983-2
DOIs	https://doi.org/10.1109/Transducers.2013.6627308
Publication status	Published - 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems - Centro de Convenciones Internacional de Barcelona (CCIB) , Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://transducers-eurosensors2013.org/

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems
Number	17
Location	Centro de Convenciones Internacional de Barcelona (CCIB)
Country/Territory	Spain
City	Barcelona
Period	16/06/2013 → 20/06/2013
Internet address	http://transducers-eurosensors2013.org/

Keywords

microswitches
network topology
optimisation
reliability
Computing and Processing
Engineering Profession
General Topics for Engineers
Geoscience
Nuclear Engineering

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10.1109/Transducers.2013.6627308

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title = "Topology optimized RF MEMS switches",

abstract = "Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology optimization for an RF MEM capacitive switch. Extensive experimental data confirms that the switches perform as designed by the optimizations, and that our simulation models are accurate. A subset of measurements are presented here. Broader results have been submitted in full journal format.",

keywords = "microswitches, network topology, optimisation, reliability, Computing and Processing, Engineering Profession, General Topics for Engineers, Geoscience, Nuclear Engineering",

author = "Philippine, \{M. A.\} and H. Zareie and Ole Sigmund and Rebeiz, \{G. M.\} and Kenny, \{T. W.\}",

year = "2013",

doi = "10.1109/Transducers.2013.6627308",

language = "English",

isbn = "978-1-4673-5983-2",

pages = "2477--2480",

booktitle = "2013 Transducers \& Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems",

publisher = "IEEE",

address = "United States",

note = "17th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 16-06-2013 Through 20-06-2013",

url = "http://transducers-eurosensors2013.org/",

}

Philippine, MA, Zareie, H, Sigmund, O, Rebeiz, GM & Kenny, TW 2013, Topology optimized RF MEMS switches. in 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, pp. 2477-2480, 17th International Conference on Solid-State Sensors, Actuators and Microsystems , Barcelona, Spain, 16/06/2013. https://doi.org/10.1109/Transducers.2013.6627308

TY - GEN

T1 - Topology optimized RF MEMS switches

AU - Philippine, M. A.

AU - Zareie, H.

AU - Sigmund, Ole

AU - Rebeiz, G. M.

AU - Kenny, T. W.

N1 - Conference code: 17

PY - 2013

Y1 - 2013

N2 - Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology optimization for an RF MEM capacitive switch. Extensive experimental data confirms that the switches perform as designed by the optimizations, and that our simulation models are accurate. A subset of measurements are presented here. Broader results have been submitted in full journal format.

AB - Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology optimization for an RF MEM capacitive switch. Extensive experimental data confirms that the switches perform as designed by the optimizations, and that our simulation models are accurate. A subset of measurements are presented here. Broader results have been submitted in full journal format.

KW - microswitches

KW - network topology

KW - optimisation

KW - reliability

KW - Computing and Processing

KW - Engineering Profession

KW - General Topics for Engineers

KW - Geoscience

KW - Nuclear Engineering

U2 - 10.1109/Transducers.2013.6627308

DO - 10.1109/Transducers.2013.6627308

M3 - Article in proceedings

SN - 978-1-4673-5983-2

SP - 2477

EP - 2480

BT - 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - IEEE

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 16 June 2013 through 20 June 2013

ER -

Topology optimized RF MEMS switches

Abstract

Conference

Keywords

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