Topology optimized RF MEMS switches

M. A. Philippine, H. Zareie, Ole Sigmund, G. M. Rebeiz, T. W. Kenny

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS devices. We present successful uses of topology optimization for an RF MEM capacitive switch. Extensive experimental data confirms that the switches perform as designed by the optimizations, and that our simulation models are accurate. A subset of measurements are presented here. Broader results have been submitted in full journal format.
Original languageEnglish
Title of host publication2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherIEEE
Publication date2013
Pages2477-2480
ISBN (Print)978-1-4673-5983-2
DOIs
Publication statusPublished - 2013
Event17th International Conference on Solid-State Sensors, Actuators and Microsystems - Centro de Convenciones Internacional de Barcelona (CCIB) , Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013
Conference number: 17
http://transducers-eurosensors2013.org/

Conference

Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems
Number17
LocationCentro de Convenciones Internacional de Barcelona (CCIB)
CountrySpain
CityBarcelona
Period16/06/201320/06/2013
Internet address

Keywords

  • microswitches
  • network topology
  • optimisation
  • reliability
  • Computing and Processing
  • Engineering Profession
  • General Topics for Engineers
  • Geoscience
  • Nuclear Engineering

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