Topology optimized electrothermal polysilicon microgrippers

Özlem Sardan Sukas; Dirch Hjorth Petersen; Kristian Mølhave; Ole Sigmund; Peter Bøggild

doi:10.1016/j.mee.2008.01.049

Topology optimized electrothermal polysilicon microgrippers

Özlem Sardan Sukas, Dirch Hjorth Petersen, Kristian Mølhave, Ole Sigmund, Peter Bøggild

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves. A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator. (C) 2008 Elsevier B.V. All rights reserved.

Original language	English
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
Pages (from-to)	1096-1099
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2008.01.049
Publication status	Published - 2008
Event	33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark Duration: 23 Sept 2007 → 26 Sept 2007 Conference number: 33 http://www.mne07.org/

Conference

Conference	33rd International Conference on Micro- and Nano-Engineering
Number	33
Country/Territory	Denmark
City	Copenhagen
Period	23/09/2007 → 26/09/2007
Internet address	http://www.mne07.org/

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@inproceedings{f1fe16cc452b44d9b7eb961dde8b5085,

title = "Topology optimized electrothermal polysilicon microgrippers",

abstract = "This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves. A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator. (C) 2008 Elsevier B.V. All rights reserved.",

author = "{Sardan Sukas}, {\"O}zlem and Petersen, {Dirch Hjorth} and Kristian M{\o}lhave and Ole Sigmund and Peter B{\o}ggild",

year = "2008",

doi = "10.1016/j.mee.2008.01.049",

language = "English",

volume = "85",

pages = "1096--1099",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "5-6",

note = "33rd International Conference on Micro- and Nano-Engineering, MNE07 ; Conference date: 23-09-2007 Through 26-09-2007",

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TY - GEN

T1 - Topology optimized electrothermal polysilicon microgrippers

AU - Sardan Sukas, Özlem

AU - Petersen, Dirch Hjorth

AU - Mølhave, Kristian

AU - Sigmund, Ole

AU - Bøggild, Peter

N1 - Conference code: 33

PY - 2008

Y1 - 2008

N2 - This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves. A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator. (C) 2008 Elsevier B.V. All rights reserved.

AB - This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves. A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator. (C) 2008 Elsevier B.V. All rights reserved.

U2 - 10.1016/j.mee.2008.01.049

DO - 10.1016/j.mee.2008.01.049

M3 - Conference article

SN - 0167-9317

VL - 85

SP - 1096

EP - 1099

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-6

T2 - 33rd International Conference on Micro- and Nano-Engineering

Y2 - 23 September 2007 through 26 September 2007

ER -

Topology optimized electrothermal polysilicon microgrippers

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