Topology optimized electrothermal polysilicon microgrippers

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Abstract

This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves. A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator. (C) 2008 Elsevier B.V. All rights reserved.
Original languageEnglish
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Pages (from-to)1096-1099
ISSN0167-9317
DOIs
Publication statusPublished - 2008
Event33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark
Duration: 23 Sep 200726 Sep 2007
Conference number: 33
http://www.mne07.org/

Conference

Conference33rd International Conference on Micro- and Nano-Engineering
Number33
Country/TerritoryDenmark
CityCopenhagen
Period23/09/200726/09/2007
Internet address

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