Topology optimized electrothermal polysilicon microgrippers

Özlem Sardan Sukas, Dirch Hjorth Petersen, Kristian Mølhave, Ole Sigmund, Peter Bøggild

    Research output: Contribution to journalConference articleResearchpeer-review

    Abstract

    This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves. A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator. (C) 2008 Elsevier B.V. All rights reserved.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume85
    Issue number5-6
    Pages (from-to)1096-1099
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2008
    Event33rd International Conference on Micro- and Nano-Engineering - Copenhagen, Denmark
    Duration: 23 Sept 200726 Sept 2007
    Conference number: 33
    http://www.mne07.org/

    Conference

    Conference33rd International Conference on Micro- and Nano-Engineering
    Number33
    Country/TerritoryDenmark
    CityCopenhagen
    Period23/09/200726/09/2007
    Internet address

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