Topology Optimization of Stressed Capacitive RF MEMS Switches

Mandy A. Philippine, Ole Sigmund, Gabriel M. Rebeiz, Thomas W. Kenny

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Geometry design can improve a capacitive radio-frequency microelectromechanical system switch's reliability by reducing the impacts of intrinsic biaxial stresses and stress gradients on the switch's membrane. Intrinsic biaxial stresses cause stress stiffening, whereas stress gradients cause out-of-plane curling. We use topology optimization to systematically generate designs, by minimizing stress stiffening, minimizing curling, or minimizing stress stiffening while constraining the curling behavior. We present the corresponding problem formulations and sensitivity derivations and discuss the role of key elements in the problem formulation.
Original languageEnglish
JournalI E E E Journal of Microelectromechanical Systems
Volume22
Issue number1
Pages (from-to)206-215
ISSN1057-7157
DOIs
Publication statusPublished - 2013

Keywords

  • Geometry design
  • Intrinsic stress
  • Mechanical design
  • Radio-frequency microelectromechanical systems (RF MEMS)
  • Stress gradient
  • Topology optimization

Fingerprint Dive into the research topics of 'Topology Optimization of Stressed Capacitive RF MEMS Switches'. Together they form a unique fingerprint.

Cite this