Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators

Dustin D. Gerrard; Yunhan Chen; Saurabh A. Chandorkar; Guo Yu; Janna Rodriguez; Ian B. Flader; Dongsuk D. Shin; Carl D. Meinhart; Ole Sigmund; Thomas W. Kenny

doi:10.1109/TRANSDUCERS.2017.7994168

Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators

Dustin D. Gerrard, Yunhan Chen, Saurabh A. Chandorkar, Guo Yu, Janna Rodriguez, Ian B. Flader, Dongsuk D. Shin, Carl D. Meinhart, Ole Sigmund, Thomas W. Kenny

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

This paper presents a topology optimization approach for reducing thermo-elastic dissipation (TED) in MEMS resonators. This algorithm is applied to a clamped-clamped resonant beam to maximize the quality factor (Q). Optimal designs have a Q ten times higher than a solid beam and are 75% higher than previously optimized devices. Furthermore, new designs have intuitive topologies. Beams are fabricated in <111> silicon wafers and experimental measurements of Q agree well with simulation.

Original language	English
Title of host publication	The proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Publisher	IEEE
Publication date	2017
Pages	794-797
ISBN (Electronic)	978-1-5386-2732-7
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994168
Publication status	Published - 2017
Event	19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan, Province of China Duration: 18 Jun 2017 → 22 Jun 2017

Conference

Conference	19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Country	Taiwan, Province of China
City	Kaohsiung
Period	18/06/2017 → 22/06/2017

Keywords

Topology
Optimization
Resonators
Finite element analysis
Micromechanical devices
Solids
Sensitivity
Topology Optimization
Finite Element
Thermo-elastic Dissipation

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Gerrard, D. D., Chen, Y., Chandorkar, S. A., Yu, G., Rodriguez, J., Flader, I. B., Shin, D. D., Meinhart, C. D., Sigmund, O., & Kenny, T. W. (2017). Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators. In The proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (pp. 794-797). IEEE. https://doi.org/10.1109/TRANSDUCERS.2017.7994168

Gerrard, Dustin D. ; Chen, Yunhan ; Chandorkar, Saurabh A. ; Yu, Guo ; Rodriguez, Janna ; Flader, Ian B. ; Shin, Dongsuk D. ; Meinhart, Carl D. ; Sigmund, Ole ; Kenny, Thomas W. / Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators. The proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE, 2017. pp. 794-797

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title = "Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators",

abstract = "This paper presents a topology optimization approach for reducing thermo-elastic dissipation (TED) in MEMS resonators. This algorithm is applied to a clamped-clamped resonant beam to maximize the quality factor (Q). Optimal designs have a Q ten times higher than a solid beam and are 75% higher than previously optimized devices. Furthermore, new designs have intuitive topologies. Beams are fabricated in <111> silicon wafers and experimental measurements of Q agree well with simulation.",

keywords = "Topology, Optimization, Resonators, Finite element analysis, Micromechanical devices, Solids, Sensitivity, Topology Optimization, Finite Element, Thermo-elastic Dissipation",

author = "Gerrard, {Dustin D.} and Yunhan Chen and Chandorkar, {Saurabh A.} and Guo Yu and Janna Rodriguez and Flader, {Ian B.} and Shin, {Dongsuk D.} and Meinhart, {Carl D.} and Ole Sigmund and Kenny, {Thomas W.}",

year = "2017",

doi = "10.1109/TRANSDUCERS.2017.7994168",

language = "English",

pages = "794--797",

booktitle = "The proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)",

publisher = "IEEE",

address = "United States",

note = " 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ; Conference date: 18-06-2017 Through 22-06-2017",

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Gerrard, DD, Chen, Y, Chandorkar, SA, Yu, G, Rodriguez, J, Flader, IB, Shin, DD, Meinhart, CD, Sigmund, O & Kenny, TW 2017, Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators. in The proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE, pp. 794-797, 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, Province of China, 18/06/2017. https://doi.org/10.1109/TRANSDUCERS.2017.7994168

Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators. / Gerrard, Dustin D.; Chen, Yunhan; Chandorkar, Saurabh A.; Yu, Guo; Rodriguez, Janna; Flader, Ian B.; Shin, Dongsuk D.; Meinhart, Carl D.; Sigmund, Ole; Kenny, Thomas W.

The proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE, 2017. p. 794-797.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators

AU - Gerrard, Dustin D.

AU - Chen, Yunhan

AU - Chandorkar, Saurabh A.

AU - Yu, Guo

AU - Rodriguez, Janna

AU - Flader, Ian B.

AU - Shin, Dongsuk D.

AU - Meinhart, Carl D.

AU - Sigmund, Ole

AU - Kenny, Thomas W.

PY - 2017

Y1 - 2017

N2 - This paper presents a topology optimization approach for reducing thermo-elastic dissipation (TED) in MEMS resonators. This algorithm is applied to a clamped-clamped resonant beam to maximize the quality factor (Q). Optimal designs have a Q ten times higher than a solid beam and are 75% higher than previously optimized devices. Furthermore, new designs have intuitive topologies. Beams are fabricated in <111> silicon wafers and experimental measurements of Q agree well with simulation.

AB - This paper presents a topology optimization approach for reducing thermo-elastic dissipation (TED) in MEMS resonators. This algorithm is applied to a clamped-clamped resonant beam to maximize the quality factor (Q). Optimal designs have a Q ten times higher than a solid beam and are 75% higher than previously optimized devices. Furthermore, new designs have intuitive topologies. Beams are fabricated in <111> silicon wafers and experimental measurements of Q agree well with simulation.

KW - Topology

KW - Optimization

KW - Resonators

KW - Finite element analysis

KW - Micromechanical devices

KW - Solids

KW - Sensitivity

KW - Topology Optimization

KW - Finite Element

KW - Thermo-elastic Dissipation

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DO - 10.1109/TRANSDUCERS.2017.7994168

M3 - Article in proceedings

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EP - 797

BT - The proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

PB - IEEE

T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Y2 - 18 June 2017 through 22 June 2017

ER -