Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators

Dustin D. Gerrard, Yunhan Chen, Saurabh A. Chandorkar, Guo Yu, Janna Rodriguez, Ian B. Flader, Dongsuk D. Shin, Carl D. Meinhart, Ole Sigmund, Thomas W. Kenny

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

This paper presents a topology optimization approach for reducing thermo-elastic dissipation (TED) in MEMS resonators. This algorithm is applied to a clamped-clamped resonant beam to maximize the quality factor (Q). Optimal designs have a Q ten times higher than a solid beam and are 75% higher than previously optimized devices. Furthermore, new designs have intuitive topologies. Beams are fabricated in <111> silicon wafers and experimental measurements of Q agree well with simulation.
Original languageEnglish
Title of host publicationThe proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
PublisherIEEE
Publication date2017
Pages794-797
ISBN (Electronic) 978-1-5386-2732-7
DOIs
Publication statusPublished - 2017
Event 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Conference

Conference 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
CountryTaiwan, Province of China
CityKaohsiung
Period18/06/201722/06/2017

Keywords

  • Topology
  • Optimization
  • Resonators
  • Finite element analysis
  • Micromechanical devices
  • Solids
  • Sensitivity
  • Topology Optimization
  • Finite Element
  • Thermo-elastic Dissipation

Fingerprint Dive into the research topics of 'Topology optimization for reduction of thermo-elastic dissipation in MEMS resonators'. Together they form a unique fingerprint.

Cite this