Topography characterization of a deep grating using near-field imaging

Niels Gregersen, Bjarne Tromborg, Valentyn S. Volkov, Sergey I. Bozhevolnyi, Johan Holm

Research output: Contribution to journalJournal articleResearchpeer-review


Using near-field optical microscopy at the wavelength of 633 nm, we image light intensity distributions at several distances above an ~2-mm deep and a 1-mm-period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.
Original languageEnglish
JournalApplied Optics
Issue number1
Pages (from-to)117-121
Publication statusPublished - 2006


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