Topography characterization of a deep grating using near-field imaging

Niels Gregersen, Bjarne Tromborg, Valentyn S. Volkov, Sergey I. Bozhevolnyi, Johan Holm

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Using near-field optical microscopy at the wavelength of 633 nm, we image light intensity distributions at several distances above an ~2-mm deep and a 1-mm-period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.
Original languageEnglish
JournalApplied Optics
Volume45
Issue number1
Pages (from-to)117-121
ISSN1559-128X
Publication statusPublished - 2006

Cite this

Gregersen, N., Tromborg, B., Volkov, V. S., Bozhevolnyi, S. I., & Holm, J. (2006). Topography characterization of a deep grating using near-field imaging. Applied Optics, 45(1), 117-121.