Tools for Manipulation and Characterisation of Nanostructures

For construction and characterization of prototype devices with nanometer-scale parts, we have developed an in-situ scanning electron microscope (SEM) laboratory with a set of novel tools for three-dimensional nanomanipulation. We have designed, fabricated, and characterized microfabricated grippers, which were then successfully used for pick-and-place manipulation of silicon nanowires. For increased gripping force and control over the manipulation process, microfabricated grippers with integrated force-feedback were also demonstrated. Environmental electron beam deposition (EEBD) was developed as a method for soldering nanotubes in electrical circuits and constructing highly conductive three-dimensional nanostructures with solid gold cores. Together the developed set of tools comprise a nanolaboratory which in many ways can accomplish the same tasks as an electronic workshop - but using components that are some 10000 times smaller.