Tolerance Verification of Micro and Nano Structures on Polycarbonate Substrates

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Abstract

Micro and nano structures are an increasing challenge in terms of tolerance verification and process quality control: smaller dimensions led to a smaller tolerance zone to be evaluated. This paper focuses on the verification of CD, DVD and HD-DVD nanoscale features. CD tolerance features are defines in relation to the optical disc functionality. SEM image processing is used to control the sub-micrometre features and detect the replication accuracy. Nickel stampers and polycarbonate moulded optical discs are measures to verify the dimensional tolerances from a metrological point of view. The replication quality is assessed and the measurements uncertainty is calculated following the substitution method.
Original languageEnglish
Title of host publicationProceedings of the 7. International Conference on Multi-Material Micro Manufacture
PublisherResearch Publishing Services
Publication date2010
Pages387-390
ISBN (Print)978-981-08-6555-9
DOIs
Publication statusPublished - 2010
Event7th International Conference on Multi-Material Micro Manufacture - Bourg en Bresse and Oyonnax, France
Duration: 17 Nov 201019 Nov 2010
Conference number: 7

Conference

Conference7th International Conference on Multi-Material Micro Manufacture
Number7
CountryFrance
CityBourg en Bresse and Oyonnax
Period17/11/201019/11/2010

Keywords

  • Uncertainty assessment
  • Tolerance verification
  • Micro and nano structures

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